We review the development of reduced-order models for MEMS devices. Based on their
implementation procedures, we classify these reduced-order models into two broad …

We consider the von Kármán nonlinearity and the Casimir force to develop reduced-order
models for prestressed clamped rectangular and circular electrostatically actuated …

We present a reduced-order model for electrically actuated microplate-based MEMS. The
model accounts for the electric force nonlinearity and the mid-plane stretching of the plate …

A size-dependent structural dynamic model that incorporates the effect of geometric
nonlinearity is developed in this paper for the forced vibration and dynamic stability of thin …

We study the influence of von Kármán nonlinearity, van der Waals force, and thermal
stresses on pull-in instability and small vibrations of electrostatically actuated microplates …

Microbeam dynamics is important in MEMS filters and resonators. In this research, the effect
of piezoelectric actuation on the resonance frequencies of a piezoelectrically actuated …

In this paper a model based on distributed parameters has been presented to study
temperature effects on the mechanical behavior of an electrostatically actuated microplate …

Methods of reduced order modelling (ROM) of nonlinear PDEs to ODEs based on
investigation of flexible arbitrary geometry of the plan nano-plates have been reviewed …

Presented herein is a comprehensive investigation on the nonlinear vibration behavior of
nanoplate-based nano electromechanical systems (NEMS) under hydrostatic and …

We consider the von Kármán nonlinearity and the Casimir force to first develop a reduced-
order model for a prestressed clamped elliptic electrostatically actuated microplate, and then …