Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

ZnO nanostructures for dye‐sensitized solar cells

Q Zhang, CS Dandeneau, X Zhou, G Cao - Advanced materials, 2009 - Wiley Online Library
This Review focuses on recent developments in the use of ZnO nanostructures for dye‐
sensitized solar cell (DSC) applications. It is shown that carefully designed and fabricated …

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

RL Puurunen - Journal of applied physics, 2005 - pubs.aip.org
Atomic layer deposition (ALD), a chemical vapor deposition technique based on sequential
self-terminating gas–solid reactions, has for about four decades been applied for …

Titanium dioxide thin films by atomic layer deposition: A review

JP Niemelä, G Marin, M Karppinen - Semiconductor science and …, 2017 - iopscience.iop.org
Within its rich phase diagram titanium dioxide is a truly multifunctional material with a
property palette that has been shown to span from dielectric to transparent-conducting …

Surface chemistry for atomic layer growth

SM George, AW Ott, JW Klaus - The Journal of Physical Chemistry, 1996 - ACS Publications
Atomic layer controlled film growth is an important technological and scientific goal that is
closely tied to many issues in surface chemistry. This article first reviews the basic concepts …

Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

J Aarik, A Aidla, AA Kiisler, T Uustare, V Sammelselg - Thin Solid Films, 1997 - Elsevier
The dependence of optical characteristics on the structure of atomic-layer-deposited titania
(TiO2) thin films is studied. Amorphous films grown at 100° C have an optical band gap of …

ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements

JW Elam, ZA Sechrist, SM George - Thin Solid Films, 2002 - Elsevier
Nanolaminates are unique nanocomposites that allow various thin film properties to be
tuned by changing the composition and interfacial density. ZnO/Al2O3 nanolaminates allow …

Atomic layer deposition of titanium dioxide from TiCl4 and H2O: investigation of growth mechanism

J Aarik, A Aidla, H Mändar, T Uustare - Applied Surface Science, 2001 - Elsevier
Atomic layer deposition (ALD) of titanium dioxide from TiCl4 and H2O was studied at
substrate temperatures of 100–400° C. Using a real-time quartz crystal microbalance …

Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone

C **, B Liu, Z Lei, J Sun - Nanoscale research letters, 2015 - Springer
TiO 2 films were grown on silicon substrates by atomic layer deposition (ALD) using tetrakis-
dimethylamino titanium and ozone. Amorphous TiO 2 film was deposited at a low substrate …

Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water

V Pore, A Rahtu, M Leskelä, M Ritala… - Chemical Vapor …, 2004 - Wiley Online Library
Titanium dioxide thin films were grown by atomic layer deposition (ALD) at 200–400° C from
a new titanium precursor, titanium tetramethoxide, and water. As compared with other …