A review of intermetallic compound growth and void formation in electrodeposited Cu–Sn Layers for microsystems packaging

HK Kannojia, P Dixit - Journal of Materials Science: Materials in …, 2021 - Springer
Abstract In recent years, Cu–Sn solid–liquid interdiffusion (SLID) bonding has been used in
semiconductor packaging, die-attach, fine-pitch interconnection, and through-silicon vias …

[HTML][HTML] Achieving low-temperature wafer level bonding with Cu-Sn-In ternary at 150° C

O Golim, V Vuorinen, G Ross, T Wernicke, M Pawlak… - Scripta Materialia, 2023 - Elsevier
In this work, a low-temperature wafer-level bonding process at 150° C was carried out on Si
wafers containing 10 µm-sized microbumps based on the Cu-Sn-In ternary system …

Investigation of Cu-Sn-Cu transient liquid phase bonding for microsystems packaging

K Pawar, P Dixit - Materials and Manufacturing Processes, 2023 - Taylor & Francis
Fabrication, characterization, and thermomechanical reliability of electroplated Cu-Sn-Cu-
based transient liquid phase (TLP) bonding required in microsystems packaging are …

Finite element simulation of solid–liquid interdiffusion bonding process: Understanding process-dependent thermomechanical stress

N Tiwary, V Vuorinen, G Ross… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Solid–liquid interdiffusion (SLID) bonding finds a wide variety of potential applications
toward die-attach, hermetic encapsulation of microelectromechanical systems (MEMS) …

[HTML][HTML] Low-Temperature Wafer-Level Bonding with Cu-Sn-In Solid Liquid Interdiffusion for Microsystem Packaging

O Golim, V Vuorinen, T Wernicke, M Pawlak… - Microelectronic …, 2024 - Elsevier
This work demonstrates the potential use of Cu-Sn-In metallurgy for wafer-level low-
temperature solid-liquid interdiffusion (LT-SLID) bonding process for …

Investigative characterization of delamination at TiW-Cu interface in low-temperature bonded interconnects

O Golim, V Vuorinen, G Ross, S Suihkonen… - Materials …, 2024 - Elsevier
The trend for heterogeneous integration has driven the need for a low-temperature bonding
process. Cu-Sn-In based solid-liquid interdiffusion (SLID) bonding technology has been …

Low-temperature die attach for power components: Cu-Sn-In solid-liquid interdiffusion bonding

F Emadi, S Liu, A Klami, N Tiwary… - 2022 14th …, 2022 - ieeexplore.ieee.org
Based on the finite element (FE) simulations done in this work, lowering the bonding
temperature significantly decreases the bonding induced residual stresses. Therefore, low …

Demonstrating 170° C Low-Temperature Cu–In–Sn Wafer-Level Solid Liquid Interdiffusion Bonding

V Vuorinen, G Ross, A Klami, H Dong… - IEEE Transactions …, 2021 - ieeexplore.ieee.org
The wafer-level solid liquid interdiffusion (SLID) bonds carried out for this work take
advantage of the Cu–In–Sn ternary system to achieve low-temperature interconnections …

Systematic Study of Liquid-State Interfacial Reactions Between Co and In-Sn Solders with Varying Sn Contents

C Wang, T Chang - Journal of Electronic Materials, 2024 - Springer
This study investigated the interfacial reactions between Co and In-Sn solders, with various
compositions, up to 90 at% Sn, at 350° C, with the aim of evaluating their potential for use in …

Low-temperature Metal Bonding for Optical Device Packaging

O Golim, V Vuorinen, N Tiwary, R Glenn… - 2021 23rd European …, 2021 - ieeexplore.ieee.org
Low-temperature solid-liquid interdiffusion (SLID) bonding is an attractive alternative for the
packaging of optical devices. It reduces global residual stress build up caused by …