Yield enhancement in semiconductor fabrication is important. Even though IC yield loss may
be attributed to many problems, the existence of defects on the wafer is one of the main …

Semiconductor wafer post-sawing requires full inspection to assure defect-free outgoing
dies. A defect problem is usually identified through visual judgment by the aid of a scanning …

Wafer defect recognition is an important process of chip manufacturing. As different process
flows can lead to different defect types, the correct identification of defect patterns is …

A numerical model that identifies the high-leverage variables associated with profitability in
semiconductor manufacturing is presented. Varying the parameters of the model …

In-line microscopy must keep up with the flow of manufacturing. At an inspection point, of
which there are several in the process stream, a fraction of the wafers will be inspected …

Since the advent of high qualification and tiny technology, yield control in the
photolithography process has played an important role in the manufacture of thin-film …

Modern submicron processes are more sensitive to both random and systematic wafer-level
process variation than ever before. Given the dimensional control limitations of new …

Yield is one of the most important indices determining the success in semiconductor
manufacturing business. Previous yield management efforts are to enhance yield of the …

A qualitative empirical study of 29 semiconductor manufacturer and supplier firms
investigates the challenges associated with implementing lean practices that require broadly …

Plasma etching is commonly employed in the chemical etching process of wafer fabrication
because of its low cost and good control of etching profile and uniformity. In the plamas …