MSC-DNet: An efficient detector with multi-scale context for defect detection on strip steel surface

R Liu, M Huang, Z Gao, Z Cao, P Cao - Measurement, 2023 - Elsevier
The strip steel has been widely used in the manufacturing industry. Defects on the surface
are main factors to determine the quality of strip steel. Due to the various shapes of the …

Geometric transformation-based data augmentation on defect classification of segmented images of semiconductor materials using a ResNet50 convolutional neural …

FL de la Rosa, JL Gómez-Sirvent… - Expert Systems with …, 2022 - Elsevier
The emergence of machine learning (ML) and deep learning (DL) techniques opens a huge
opportunity for their implementation in industry. One of the tasks for which these techniques …

Automated semiconductor defect inspection in scanning electron microscope images: a systematic review

T Lechien, E Dehaerne, B Dey, V Blanco… - arxiv preprint arxiv …, 2023 - arxiv.org
A growing need exists for efficient and accurate methods for detecting defects in
semiconductor materials and devices. These defects can have a detrimental impact on the …

Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight …

FL de la Rosa, JL Gómez-Sirvent, R Morales… - Computers & Industrial …, 2023 - Elsevier
The manufacturing industry is evolving in line with the principles of Industry 4.0, with the aim
of achieving higher levels of automation and digitization. In particular, deep learning …

A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication

HW Xu, W Qin, JH Hu, YN Sun, YL Lv… - Advanced Engineering …, 2024 - Elsevier
Wafer fabrication is a highly complex manufacturing system. Using complex network models
to portray the correlation between parameters is an effective tool for finding the key …

Industry 5.0: Research areas and challenges with artificial intelligence and human acceptance

G Dimitrakopoulos, P Varga, T Gutt… - IEEE Industrial …, 2024 - ieeexplore.ieee.org
The industrial landscape is swiftly progressing towards Industry5. 0, marking the fifth
revolution characterized by the integration of sustainable practices and digital sovereignty …

EFS-YOLO: a lightweight network based on steel strip surface defect detection

B Chen, M Wei, J Liu, H Li, C Dai… - … Science and Technology, 2024 - iopscience.iop.org
With the advancement of deep learning technologies, industrial intelligent detection
algorithms are gradually being applied in practical steel surface defect detection …

Wafer surface defect detection based on background subtraction and faster R-CNN

J Zheng, T Zhang - Micromachines, 2023 - mdpi.com
Concerning the problem that wafer surface defects are easily confused with the background
and are difficult to detect, a new detection method for wafer surface defects based on …

A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets

FL de la Rosa, JL Gómez-Sirvent, R Morales… - Applied Soft …, 2022 - Elsevier
The detection of defects using inspection systems is common in a wide range of
corporations such as semiconductor industries. The use of techniques based on deep …

Fabgpt: An efficient large multimodal model for complex wafer defect knowledge queries

Y Jiang, X Lu, Q **, Q Sun, H Wu, C Zhuo - arxiv preprint arxiv …, 2024 - arxiv.org
Intelligence is key to advancing integrated circuit (IC) fabrication. Recent breakthroughs in
Large Multimodal Models (LMMs) have unlocked unparalleled abilities in understanding …