Atomically precise manufacturing of silicon electronics

J Pitters, J Croshaw, R Achal, L Livadaru, S Ng… - ACS …, 2024 - ACS Publications
Atomically precise manufacturing (APM) is a key technique that involves the direct control of
atoms in order to manufacture products or components of products. It has been developed …

A solid-state quantum microscope for wavefunction control of an atom-based quantum dot device in silicon

B Voisin, J Salfi, DD St Médar, BC Johnson… - Nature …, 2023 - nature.com
Quantum states of atomic systems can be directly addressed using quantum optical
microscopes. However, solid-state microscopy techniques cannot typically achieve both …

Atom‐by‐atom fabrication of single and few dopant quantum devices

J Wyrick, X Wang, RV Kashid… - Advanced Functional …, 2019 - Wiley Online Library
Atomically precise fabrication has an important role to play in develo** atom‐based
electronic devices for use in quantum information processing, quantum materials research …

AlCl3-Dosed Si(100)-2 × 1: Adsorbates, Chlorinated Al Chains, and Incorporated Al

MS Radue, S Baek, A Farzaneh, KJ Dwyer… - The Journal of …, 2021 - ACS Publications
The adsorption of AlCl3 on Si (100) and the effect of annealing the AlCl3-dosed substrate
were studied to reveal key surface processes for the development of atomic-precision …

Sub-10 nm patterning of few-layer MoS2 and MoSe2 nanolectronic devices by oxidation scanning probe lithography

YK Ryu, AI Dago, Y He, FM Espinosa… - Applied Surface …, 2021 - Elsevier
The properties of 2D materials devices are very sensitive to the physical, chemical and
structural interactions that might happen during processing. Low-invasive patterning …

Fast turnaround fabrication of silicon point-contact quantum-dot transistors using combined thermal scanning probe lithography and laser writing

C Rawlings, YK Ryu, M Rüegg, N Lassaline… - …, 2018 - iopscience.iop.org
The fabrication of high-performance solid-state silicon quantum-devices requires high
resolution patterning with minimal substrate damage. We have fabricated room temperature …

Detecting and Directing Single Molecule Binding Events on H-Si (100) with Application to Ultradense Data Storage

R Achal, M Rashidi, J Croshaw, TR Huff, RA Wolkow - ACS nano, 2019 - ACS Publications
Many diverse material systems are being explored to enable smaller, more capable and
energy efficient devices. These bottom up approaches for atomic and molecular electronics …

Four-point measurement setup for correlative microscopy of nanowires

BC Pruchnik, JD Fidelus, E Gacka, K Kwoka… - Nanomaterials, 2023 - mdpi.com
The measurement method, which utilizes nanomanipulation of the nanowires onto a
specially prepared substrate, was presented. It introduced a four-point resistance …

Low-Resistance, High-Yield Electrical Contacts to Atom Scale Devices Using Palladium Silicide

SW Schmucker, PN Namboodiri, R Kashid, X Wang… - Physical review applied, 2019 - APS
Scanning tunneling microscopy (STM) enables the fabrication of two-dimensional δ-doped
structures in Si with atomistic precision, with applications from tunnel field-effect transistors …

Multi-scale alignment to buried atom-scale devices using Kelvin probe force microscopy

P Namboodiri, J Wyrick, G Stan, X Wang… - Nanotechnology …, 2024 - degruyter.com
Fabrication of quantum devices by atomic-scale patterning with scanning tunneling
microscopy (STM) has led to the development of single/few atom transistors, few …