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Wafer map failure pattern recognition and similarity ranking for large-scale data sets
Wafer maps can exhibit specific failure patterns that provide crucial details for assisting
engineers in identifying the cause of wafer pattern failures. Conventional approaches of …
engineers in identifying the cause of wafer pattern failures. Conventional approaches of …
Wafer map defect patterns classification using deep selective learning
With the continuous drive toward integrated circuits scaling, efficient yield analysis is
becoming more crucial yet more challenging. In this paper, we propose a novel …
becoming more crucial yet more challenging. In this paper, we propose a novel …
Apparatus and methods for detecting overlay errors using scatterometry
WD Mieher, A Levy, B Golovanesky… - US Patent …, 2008 - Google Patents
Disclosed are techniques, apparatus, and targets for deter mining overlay error between two
layers of a sample. In one embodiment, a method for determining overlay between a …
layers of a sample. In one embodiment, a method for determining overlay between a …
Methods and apparatus for data analysis
E Miguelanez, MJ Scott, J Gorin, P Buxton… - US Patent …, 2008 - Google Patents
(54) METHODS AND APPARATUS FOR DATA G06N 3/12(2006.01) ANALYSIS(52) US
Cl............................ 702/108: 714/26: 706/13 (58) Field of Classification Search …
Cl............................ 702/108: 714/26: 706/13 (58) Field of Classification Search …
Apparatus and methods for detecting overlay errors using scatterometry
WD Mieher, A Levy, B Golovanesky… - US Patent …, 2007 - Google Patents
Disclosed is a method for determining an overlay error between at least two layers in a
multiple layer sample. A sample having a plurality of periodic targets that each have a first …
multiple layer sample. A sample having a plurality of periodic targets that each have a first …
Silicon wafer map defect classification using deep convolutional neural network with data augmentation
Wafer map defect classification is one of the most important process for semiconductor
manufacturing. Wafer map defects are also cause of die failures. So, we propose a better …
manufacturing. Wafer map defects are also cause of die failures. So, we propose a better …
Methods and apparatus for data analysis
PM Buxton, EP Tabor, EM Martin… - US Patent 7,225,107, 2007 - Google Patents
US7225107B2 - Methods and apparatus for data analysis - Google Patents US7225107B2 -
Methods and apparatus for data analysis - Google Patents Methods and apparatus for data …
Methods and apparatus for data analysis - Google Patents Methods and apparatus for data …
Enhanced Deep Convolutional Neural Network for Identifying and Classification of Silicon Wafer Faults in IC Fabrication Industries
This paper presents the detection and classification of various manufacturing defects on
wafer maps using an enhanced deep convolutional neural network (DCNN). Wafers are tiny …
wafer maps using an enhanced deep convolutional neural network (DCNN). Wafers are tiny …
[PDF][PDF] Inspection in semiconductor manufacturing
KW Tobin - Webster's Encyclopedia of Electrical and Electronic …, 1999 - Citeseer
In-line microscopy must keep up with the flow of manufacturing. At an inspection point, of
which there are several in the process stream, a fraction of the wafers will be inspected …
which there are several in the process stream, a fraction of the wafers will be inspected …
Apparatus and methods for detecting overlay errors using scatterometry
WD Mieher, A Levy, B Golovanevsky… - US Patent …, 2007 - Google Patents
Disclosed is a method of determining an overlay error between two layers of a multiple layer
sample. For each of a plurality of periodic targets target that each have a first structure …
sample. For each of a plurality of periodic targets target that each have a first structure …