Recent advances in the growth of gallium oxide thin films employing various growth techniques—a review

BR Tak, S Kumar, AK Kapoor, D Wang… - Journal of Physics D …, 2021 - iopscience.iop.org
Abstract Gallium oxide (Ga 2 O 3) is rapidly emerging as a material of choice for the
development of solar blind photodetectors and power electronic devices which are …

Ga 2 O 3 polymorphs: tailoring the epitaxial growth conditions

M Bosi, P Mazzolini, L Seravalli… - Journal of Materials …, 2020 - pubs.rsc.org
Gallium oxide is a wide bandgap n-type semiconductor highly interesting for optoelectronic
applications (eg, power electronics and solar blind UV photodetectors). Besides its most …

Highly tunable, polarization-engineered two-dimensional electron gas in ε-AlGaO3/ε-Ga2O3 heterostructures

P Ranga, SB Cho, R Mishra… - Applied Physics …, 2020 - iopscience.iop.org
We report on the modeling of polarization-induced two-dimensional electron gas (2DEG)
formation at ε-AlGaO 3/ε-Ga 2 O 3 heterointerface and the effect of spontaneous polarization …

Editors' choice—electrical properties and deep traps in α-Ga2O3: Sn films grown on sapphire by halide vapor phase epitaxy

AY Polyakov, VI Nikolaev, SI Stepanov… - ECS Journal of Solid …, 2020 - iopscience.iop.org
Films of α-Ga 2 O 3 doped with Sn were grown by halide vapor phase epitaxy (HVPE) on
planar and patterned sapphire substrates. For planar substrates, with the same high Sn flow …

All-water etching-free electron beam lithography for on-chip nanomaterials

X Wang, X Dai, H Wang, J Wang, Q Chen, F Chen… - ACS …, 2023 - ACS Publications
Electron beam lithography uses an accelerated electron beam to fabricate patterning on an
electron-beam-sensitive resist but requires complex dry etching or lift-off processes to …

(AlxGa1-x) 2O3-based materials: Growth, properties, and device applications

H Li, Z Wu, S Wu, P Tian, Z Fang - Journal of Alloys and Compounds, 2023 - Elsevier
In recent years, the (Al x Ga 1-x) 2 O 3 materials have attracted intense research interest due
to their considerable potentials in the fabrication of deep-ultraviolet optoelectronic and high …

Control of phase formation of (AlxGa1− x) 2O3 thin films on c-plane Al2O3

A Hassa, C Wouters, M Kneiß, D Splith… - Journal of Physics D …, 2020 - iopscience.iop.org
Control of phase formation of (AlxGa1 − x)2O3 thin films on c-plane Al2O3 - IOPscience This
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Single-Domain and Atomically Flat Surface of κ-Ga2O3 Thin Films on FZ-Grown ε-GaFeO3 Substrates via Step-Flow Growth Mode

H Nishinaka, O Ueda, D Tahara, Y Ito, N Ikenaga… - ACS …, 2020 - ACS Publications
Herein, single-domain κ-Ga2O3 thin films were grown on FZ-grown ε-GaFeO3 substrates via
a step-flow growth mode. The ε-GaFeO3 possessing the same crystal structure and similar …

[HTML][HTML] Indium: A surfactant for the growth of ɛ/κ-Ga2O3 by molecular beam epitaxy

A Karg, A Hinz, S Figge, M Schowalter, P Vogt… - APL Materials, 2023 - pubs.aip.org
The influence of In on the growth of ɛ-Ga 2 O 3 by plasma-assisted molecular beam epitaxy
is investigated. We demonstrate alloying of ɛ-Ga 2 O 3 with In and describe its incorporation …

[HTML][HTML] Growth, structural and optical properties of coherent κ-(AlxGa1− x) 2O3/κ-Ga2O3 quantum well superlattice heterostructures

M Kneiß, P Storm, A Hassa, D Splith… - APL Materials, 2020 - pubs.aip.org
High quality heteroepitaxial (001)-oriented κ-(Al x Ga 1− x) 2 O 3/κ-Ga 2 O 3 quantum well
superlattice heterostructures were deposited by tin-assisted pulsed laser deposition on c …