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RF MEMS from a device perspective
JJ Yao - Journal of micromechanics and microengineering, 2000 - iopscience.iop.org
This paper reviews the recent progress in MEMS for radio frequency (RF) applications from
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …
Integrated circuit technology options for RFICs-present status and future directions
This paper will summarize the technology tradeoffs that are involved in the implementation
of radio frequency integrated circuits for wireless communications. Radio transceiver circuits …
of radio frequency integrated circuits for wireless communications. Radio transceiver circuits …
[كتاب][B] RF MEMS: theory, design, and technology
GM Rebeiz - 2004 - books.google.com
Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs),
such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or …
such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or …
Performance of low-loss RF MEMS capacitive switches
CL Goldsmith, Z Yao, S Eshelman… - IEEE Microwave and …, 1998 - ieeexplore.ieee.org
'This letter details the construction and performance of metal membrane radio frequency
MEMS switches at microwave and millimeter-wave frequencies. These shunt switches …
MEMS switches at microwave and millimeter-wave frequencies. These shunt switches …
Distributed MEMS true-time delay phase shifters and wide-band switches
Wide-band switches and true-time delay (TTD) phase shifters have been developed using
distributed microelectromechanical system (MEMS) transmission lines for applications in …
distributed microelectromechanical system (MEMS) transmission lines for applications in …
Micromachined low-loss microwave switches
ZJ Yao, S Chen, S Eshelman… - Journal of …, 1999 - ieeexplore.ieee.org
The design and fabrication of a micromechanical capacitive membrane microwave switching
device is described. The switching element consists of a thin metallic membrane, which has …
device is described. The switching element consists of a thin metallic membrane, which has …
Single-pole eight-throw RF MEMS rotary switch
The design, fabrication, and measured performance of a novel single-pole eight-throw radio-
frequency (RF) microelectromechanical systems (MEMS) rotary switch are described. The …
frequency (RF) microelectromechanical systems (MEMS) rotary switch are described. The …
Novel rf mems switches
This paper reviews three novel RF MEMS ohmic contact switches, each being designed for
specific applications. All three were developed at Imperial College London. The first is a …
specific applications. All three were developed at Imperial College London. The first is a …
Characteristics of micromachined switches at microwave frequencies
This article reviews the fundamental characteristics of micromechanical membrane switches
operating at microwave frequencies. The construction and theory of operation of capacitive …
operating at microwave frequencies. The construction and theory of operation of capacitive …
Micromechanical membrane switches for microwave applications
C Goldsmith, TH Lin, B Powers… - Proceedings of 1995 …, 1995 - ieeexplore.ieee.org
This paper proposes the fabrication of low-cost, low-loss microwave switches using thin
metal membranes actuated by electrostatic fields. Measurement of switch test structures and …
metal membranes actuated by electrostatic fields. Measurement of switch test structures and …