Review of modeling electrostatically actuated microelectromechanical systems

RC Batra, M Porfiri, D Spinello - Smart Materials and Structures, 2007 - iopscience.iop.org
A wide range of microelectromechanical systems (MEMSs) and devices are actuated using
electrostatic forces. Multiphysics modeling is required, since coupling among different fields …

[LIVRE][B] Modeling mems and nems

JA Pelesko, DH Bernstein - 2002 - api.taylorfrancis.com
Designing small structures necessitates an a priori understanding of various device
behaviors. The way to gain such understanding is to construct, analyze, and interpret the …

[LIVRE][B] Mathematical analysis of partial differential equations modeling electrostatic MEMS

P Esposito, N Ghoussoub, Y Guo - 2010 - books.google.com
" Micro-and nanoelectromechanical systems (MEMS and NEMS), which combine electronics
with miniature-size mechanical devices, are essential components of modern technology. It …

[HTML][HTML] Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force

RC Batra, M Porfiri, D Spinello - International Journal of Solids and …, 2008 - Elsevier
We consider the von Kármán nonlinearity and the Casimir force to develop reduced-order
models for prestressed clamped rectangular and circular electrostatically actuated …

Mathematical modeling of electrostatic MEMS with tailored dielectric properties

JA Pelesko - SIAM Journal on Applied Mathematics, 2002 - SIAM
The" pull-in" or" snap-down" instability in electrostatically actuated microelectromechanical
systems (MEMS) presents a ubiquitous challenge in MEMS technology of great importance …

On the partial differential equations of electrostatic MEMS devices: stationary case

N Ghoussoub, Y Guo - SIAM Journal on Mathematical Analysis, 2007 - SIAM
We analyze the nonlinear elliptic problem Δu=λf(x)(1+u)^2 on a bounded domain Ω of R^N
with Dirichlet boundary conditions. This equation models a simple electrostatic micro …

Touchdown and pull-in voltage behavior of a MEMS device with varying dielectric properties

Y Guo, Z Pan, MJ Ward - SIAM Journal on Applied Mathematics, 2005 - SIAM
The pull-in voltage instability associated with a simple MEMS device, consisting of a thin
dielectric elastic membrane supported above a rigid conducting ground plate, is analyzed …

Effects of van der Waals force and thermal stresses on pull-in instability of clamped rectangular microplates

RC Batra, M Porfiri, D Spinello - Sensors, 2008 - mdpi.com
We study the influence of von Kármán nonlinearity, van der Waals force, and thermal
stresses on pull-in instability and small vibrations of electrostatically actuated microplates …

Control of an electrostatic microelectromechanical system using static and dynamic output feedback

DHS Maithripala, JM Berg, WP Dayawansa - 2005 - asmedigitalcollection.asme.org
This paper examines control strategies for electrostatically actuated microelectromechanical
systems (MEMS), with the goals of using feasible measurements to eliminate the pull-in …

Analysis of the dynamics and touchdown in a model of electrostatic MEMS

G Flores, G Mercado, JA Pelesko, N Smyth - SIAM Journal on Applied …, 2007 - SIAM
We study a reaction-diffusion equation in a bounded domain in the plane, which is a
mathematical model of an idealized electrostatically actuated microelectromechanical …