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Emerging SiC applications beyond power electronic devices
In recent years, several new applications of SiC (both 4H and 3C polytypes) have been
proposed in different papers. In this review, several of these emerging applications have …
proposed in different papers. In this review, several of these emerging applications have …
Technology and applications of micro-LEDs: their characteristics, fabrication, advancement, and challenges
Micro-light-emitting diodes (μLEDs) are getting much attention in display industry because of
their outstanding optical and electrical characteristics. μLEDs have several advantages over …
their outstanding optical and electrical characteristics. μLEDs have several advantages over …
Experimental investigation and optimization of femtosecond laser processing parameters of silicon carbide–based on response surface methodology
The femtosecond laser, with its extremely high peak power and ultrashort pulse duration, is
widely used in silicon carbide (SiC) processing. Herein, the response surface method was …
widely used in silicon carbide (SiC) processing. Herein, the response surface method was …
4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation
Inertial navigation on a chip has long been constrained by the noise and stability issues of
micromechanical Coriolis gyroscopes, as silicon, the dominant material for …
micromechanical Coriolis gyroscopes, as silicon, the dominant material for …
Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators
Hexagonal 4H-silicon carbide (4H-SiC) is a transversely isotropic substrate garnering
interest for precision MEMS devices such as resonant gyroscopes. This paper investigates …
interest for precision MEMS devices such as resonant gyroscopes. This paper investigates …
Robust Scandium Aluminum Nitride MEMS Resonators for L Band Operation in Orbital Environments
IW Dunk - 2021 - scholar.afit.edu
This thesis investigates AlN alloyed with scandium in a variety of resonator architectures
including WEM, overtone WEM, LEM, and SAW that have the potential to achieve high levels …
including WEM, overtone WEM, LEM, and SAW that have the potential to achieve high levels …