Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks
We report theoretical and experimental results for imaging of electromagnetic phase edge
effects in lithography photomasks. Our method starts from the transport of intensity equation …
effects in lithography photomasks. Our method starts from the transport of intensity equation …
[KNIHA][B] Differential methods for phase imaging in optical lithography
A Shanker - 2018 - search.proquest.com
Differential methods are shown to reveal inherent phase in light, corresponding to either the
structure of the scattering object, or to aberrations in the imaging medium. Intensity …
structure of the scattering object, or to aberrations in the imaging medium. Intensity …
Fast control of temporal and spatial coherence properties of microscope illumination using DLP projector
We present a novel technique for coherence engineering of the microscope illumination
based on a DLP projector providing fast (millisecond range) switchable both temporal and …
based on a DLP projector providing fast (millisecond range) switchable both temporal and …
Fast control of temporal and spatial coherence properties of microscope illumination using DLP projector
JA Rodrigo Martín-Romo, TK Alieva - 2015 - docta.ucm.es
We present a novel technique for coherence engineering of the microscope illumination
based on a DLP projector providing fast (millisecond range) switchable both temporal and …
based on a DLP projector providing fast (millisecond range) switchable both temporal and …