A review of various single layer, bilayer, and multilayer TCO materials and their applications
Since fabricating the first transparent conductive oxide (TCO) material, several investigations
and applications have been reported in such fields as portable and flexible electronics, solar …
and applications have been reported in such fields as portable and flexible electronics, solar …
In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS
A novel design that utilizes aluminum nitride (AlN) piezoelectric thin films deposited on
vertical surfaces for lateral motion and sensing is a step toward emerging multi‐axial …
vertical surfaces for lateral motion and sensing is a step toward emerging multi‐axial …
Piezoelectric aluminum nitride thin films for CMOS compatible MEMS: Sputter deposition and do**
S Sandeep, RMR Pinto, J Rudresh… - Critical Reviews in …, 2024 - Taylor & Francis
Amongst the piezoelectric thin films suited for microelectromechanical systems (MEMS), AlN
has gained particular technological relevance due to its unique material properties (large …
has gained particular technological relevance due to its unique material properties (large …
Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls
E Österlund, H Seppänen, K Bespalova… - Journal of Vacuum …, 2021 - pubs.aip.org
Atomic layer deposition (ALD) of aluminum nitride (AlN) using in situ atomic layer annealing
(ALA) is studied for microelectromechanical systems (MEMS). Effective piezoelectric in …
(ALA) is studied for microelectromechanical systems (MEMS). Effective piezoelectric in …
Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices
With the integration of 5G in day-to-day devices and the foreseeable 6G revolution, demand
for advanced radio frequency (RF) microelectromechanical systems (MEMS) is growing …
for advanced radio frequency (RF) microelectromechanical systems (MEMS) is growing …
Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication
Aluminum nitride (AlN) grown on vertical surfaces can be utilized for the fabrication of
advanced piezoelectric microelectromechanical systems (MEMS). The in‐plane motion of …
advanced piezoelectric microelectromechanical systems (MEMS). The in‐plane motion of …
[HTML][HTML] Scaling of piezoelectric in-plane NEMS: Towards nanoscale integration of AlN-based transducer on vertical sidewalls
One of the key advantages of Piezoelectric MEMS (PiezoMEMS) is its scalability,
overcoming issues commonly associated with alternative transduction methods. However …
overcoming issues commonly associated with alternative transduction methods. However …
[HTML][HTML] Unlocking the potential of piezoelectric films grown on vertical surfaces for inertial MEMS
Devices based on piezoelectric actuation are some of the most promising among the
microelectromechanical systems (MEMS). Commonly, piezoelectric materials, such as …
microelectromechanical systems (MEMS). Commonly, piezoelectric materials, such as …
Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS--from combinatorial screening to piezoelectric devices
J Patidar, K Thorwarth, T Schmitz-Kempen… - arxiv preprint arxiv …, 2024 - arxiv.org
Fueled by the 5G revolution, the demand for advanced radio frequency micro-
electromechanical systems (MEMS) based on AlScN is growing rapidly. However …
electromechanical systems (MEMS) based on AlScN is growing rapidly. However …
Properties of stainless-steel surface after hollow cathode assisted plasma nitriding
Z Zhang, Y Bi, M Zhang, Y Li, F Zhao… - Materials Research …, 2020 - iopscience.iop.org
AISI 304 stainless steel was nitrided at different temperature in the plasma equipment using
a new auxiliary device. The proposed hollow cathode auxiliary device improves the plasma …
a new auxiliary device. The proposed hollow cathode auxiliary device improves the plasma …