[HTML][HTML] Evidence of silicide at the ni/β-si3n4 (0001)/si (111) interface

P Rajak, R Ciancio, A Caretta, S Laterza… - Applied Surface …, 2023 - Elsevier
We present a study of a sub-nanometre interlayer of crystalline silicon nitride at the Ni/Si
interface. We performed transmission electron microscopy measurements complemented by …

Redistribution of Pt during the agglomeration of NiSi

D Mangelinck, FM Anak, K Dabertrand, S Guillemin… - Acta Materialia, 2025 - Elsevier
Due to the constant downscaling of microelectronic devices, thin films of Ni-Pt monosilicide,
Ni (Pt) Si, are widely used as contact materials on the active regions of complementary metal …

A kinetic model of diffusional phase transformations in ternary line compounds and determination of diffusion coefficients: Application to the Nb–Mo–Si system

Y Huang, T Fu, X Xu, N Wang - Acta Materialia, 2024 - Elsevier
The diffusional phase transformations in inhomogeneous multicomponent systems play an
important role in affecting the material properties. Ternary line compounds, which are ternary …

Nucleation and lateral growth kinetics of the NiSi phase at the epitaxial θ-Ni2Si/Si interface

M El Kousseifi, K Hoummada, F Panciera, C Lavoie… - Acta Materialia, 2020 - Elsevier
The first stages of the growth of the NiSi phase at the expense of θ-Ni 2 Si have been
studied mainly by in-situ XRD measurements and atom probe tomography (APT) analysis. In …

Study of reaction-diffusion controlled mass transport in stopped-flow fluidics for spatiotemporal multiplexing

M Tintelott, P Gharpure, Y Coffinier, XT Vu… - Physics of …, 2023 - pubs.aip.org
Integration of biochemical reaction networks (BRNs) with biosensor platforms has emerged
as a technological niche overcoming challenges related to the loss of sensitivity and …

Impact of the pre amorphization by Ge implantation on Ni0. 9Pt0. 1 silicide

C Delwail, S Joblot, F Mazen, F Abbate, L Lachal… - Microelectronic …, 2022 - Elsevier
The impact of the Pre Amorphization by Ge Implantation (PAI) on Ni 0.9 Pt 0.1 silicide is
studied. Reactions between a 10 nm thick Ni 0.9 Pt 0.1 film and Si (100) substrate are …

Effect of a Ti diffusion barrier on the cobalt silicide formation: solid solution, segregation and reactive diffusion

H Zschiesche, C Alfonso, A Charaï, D Mangelinck - Acta Materialia, 2021 - Elsevier
Diffusion barriers play an important role in numerous phase formation processes. A well
known example in microelectronics is the reactive diffusion growth of silicide thin films which …

Platinum redistribution in the Ni0. 9Pt0. 1/InP system: Impact on solid-state reaction and layer morphology

F Boyer, K Dabertrand, P Gergaud, M Grégoire… - Materials Science in …, 2021 - Elsevier
In the scope of integrating III–V device contacts on a 300 mm platform, Ni-based contacts are
envisioned. In this regard, the Pt redistribution in the Ni 0.9 Pt 0.1/InP system, and the impact …

DIFFUSION INTERACTION MODEL IN AL-FE2O3 SYSTEM INCLUDING THE FORMATION OF INTERMETALLIC PHASES

MA Anisimova, AG Knyazeva - Interfacial Phenomena and …, 2024 - dl.begellhouse.com
In this paper, we consider the problem of interaction of a spherical iron oxide particle with an
aluminum melt surrounding it. A comparison of two different approaches to describing the …

Mechanisms of silicide formation by reactive diffusion in thin films

D Mangelinck - Diffusion foundations, 2019 - Trans Tech Publ
Silicide formation by reactive diffusion is of interest in numerous applications especially for
contact formation and interconnections in microelectronics. Several reviews have been …