A review of nanometer resolution position sensors: Operation and performance

AJ Fleming - Sensors and Actuators A: Physical, 2013‏ - Elsevier
Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …

Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

YK Yong, SOR Moheimani, BJ Kenton… - Review of scientific …, 2012‏ - pubs.aip.org
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

Single-electrode-based sliding triboelectric nanogenerator for self-powered displacement vector sensor system

Y Yang, H Zhang, J Chen, Q **g, YS Zhou, X Wen… - Acs Nano, 2013‏ - ACS Publications
We report a single-electrode-based sliding-mode triboelectric nanogenerator (TENG) that
not only can harvest mechanical energy but also is a self-powered displacement vector …

A survey of control issues in nanopositioning

S Devasia, E Eleftheriou… - IEEE Transactions on …, 2007‏ - ieeexplore.ieee.org
Nanotechnology is the science of understanding matter and the control of matter at
dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and …

A review on actuation and sensing techniques for MEMS-based microgrippers

S Yang, Q Xu - Journal of Micro-Bio Robotics, 2017‏ - Springer
Microelectromechanical system (MEMS) reveals excellent flexibility and adaptability in
miniaturization devices owing to its compact dimension, low power consumption, and fine …

Triboelectric sensor for self-powered tracking of object motion inside tubing

Y Su, G Zhu, W Yang, J Yang, J Chen, Q **g, Z Wu… - ACS …, 2014‏ - ACS Publications
We report a self-powered, single-electrode-based triboelectric sensor (SE-TES) array for
detecting object motion inside of a plastic tube. This innovative, cost-effective, simple …

Electrical, thermal, and mechanical characterization of silicon microcantilever heaters

J Lee, T Beechem, TL Wright, BA Nelson… - Journal of …, 2006‏ - ieeexplore.ieee.org
Silicon atomic force microscope (AFM) cantilevers having integrated solid-state heaters
were originally developed for application to data storage, but have since been applied to …

Tip-based nanofabrication for scalable manufacturing

H Hu, HJ Kim, S Somnath - Micromachines, 2017‏ - mdpi.com
Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use
a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history …

Probe-based ultrahigh-density storage technology

A Pantazi, A Sebastian… - IBM Journal of …, 2008‏ - ieeexplore.ieee.org
Ultrahigh storage densities can be achieved by using a thermomechanical scanning-probe-
based data-storage approach to write, read back, and erase data in very thin polymer films …

Heated atomic force microscope cantilevers and their applications

WP King, B Bhatia, JR Felts, HJ Kim… - Annual Review of …, 2013‏ - dl.begellhouse.com
Atomic force microscope (AFM) cantilevers with integrated heaters enable nanometer-scale
heat flow measurements, materials characterization, nanomanufacturing, and many other …