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A review of nanometer resolution position sensors: Operation and performance
Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …
and fabrication machines. Since the sensor characteristics can define the linearity …
Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
Single-electrode-based sliding triboelectric nanogenerator for self-powered displacement vector sensor system
We report a single-electrode-based sliding-mode triboelectric nanogenerator (TENG) that
not only can harvest mechanical energy but also is a self-powered displacement vector …
not only can harvest mechanical energy but also is a self-powered displacement vector …
A survey of control issues in nanopositioning
Nanotechnology is the science of understanding matter and the control of matter at
dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and …
dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and …
A review on actuation and sensing techniques for MEMS-based microgrippers
Microelectromechanical system (MEMS) reveals excellent flexibility and adaptability in
miniaturization devices owing to its compact dimension, low power consumption, and fine …
miniaturization devices owing to its compact dimension, low power consumption, and fine …
Triboelectric sensor for self-powered tracking of object motion inside tubing
We report a self-powered, single-electrode-based triboelectric sensor (SE-TES) array for
detecting object motion inside of a plastic tube. This innovative, cost-effective, simple …
detecting object motion inside of a plastic tube. This innovative, cost-effective, simple …
Electrical, thermal, and mechanical characterization of silicon microcantilever heaters
Silicon atomic force microscope (AFM) cantilevers having integrated solid-state heaters
were originally developed for application to data storage, but have since been applied to …
were originally developed for application to data storage, but have since been applied to …
Tip-based nanofabrication for scalable manufacturing
Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use
a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history …
a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history …
Probe-based ultrahigh-density storage technology
Ultrahigh storage densities can be achieved by using a thermomechanical scanning-probe-
based data-storage approach to write, read back, and erase data in very thin polymer films …
based data-storage approach to write, read back, and erase data in very thin polymer films …
Heated atomic force microscope cantilevers and their applications
Atomic force microscope (AFM) cantilevers with integrated heaters enable nanometer-scale
heat flow measurements, materials characterization, nanomanufacturing, and many other …
heat flow measurements, materials characterization, nanomanufacturing, and many other …