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Electrostatic pull-in instability in MEMS/NEMS: A review
WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …
Fractal N/MEMS: from pull-in instability to pull-in stability
Pull-in instability, as an inherent nonlinear problem, continues to become an increasingly
important and interesting topic in the design of electrostatic Nano/Micro-electromechanical …
important and interesting topic in the design of electrostatic Nano/Micro-electromechanical …
MEMS-based microspectrometer technologies for NIR and MIR wavelengths
LP Schuler, JS Milne, JM Dell… - Journal of Physics D …, 2009 - iopscience.iop.org
Commercially manufactured near-infrared (NIR) instruments became available about 50
years ago. While they have been designed for laboratory use in a controlled environment …
years ago. While they have been designed for laboratory use in a controlled environment …
Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation
The development of manufacturing tools and processes capable of precisely positioning and
manipulating nanoscale components and materials is still in its embryonic stage …
manipulating nanoscale components and materials is still in its embryonic stage …
Stabilization control of a MEMS accelerometer with tuned quasi-zero stiffness
Y Guo, Z Ma, T Zhang, Y **, X Zheng… - IEEE Sensors …, 2021 - ieeexplore.ieee.org
In this paper, a novel MEMS accelerometer with tuned quasi-zero stiffness stabilized and
operated in a closed-loop is proposed. By using the electrostatic softening effect of the …
operated in a closed-loop is proposed. By using the electrostatic softening effect of the …
DC dynamic pull-in predictions for a generalized clamped–clamped micro-beam based on a continuous model and bifurcation analysis
PCP Chao, CW Chiu, TH Liu - Journal of Micromechanics and …, 2008 - iopscience.iop.org
This study is devoted to providing precise predictions of the dc dynamic pull-in voltages of a
clamped–clamped micro-beam based on a continuous model. A pull-in phenomenon occurs …
clamped–clamped micro-beam based on a continuous model. A pull-in phenomenon occurs …
Pull-in instability of a typical electrostatic MEMS resonator and its control by delayed feedback
H Shang - Nonlinear Dynamics, 2017 - Springer
Pull-in instability of the electrostatic microstructures is a common undesirable phenomenon
which implies the loss of reliability of micro-electromechanical systems. Therefore, it is …
which implies the loss of reliability of micro-electromechanical systems. Therefore, it is …
Design of a robust PID-control switching scheme for an electrostatic micro-actuator
In this article, a robust switching PID controller coupled to a feedforward compensator is
designed for set-point regulation of an electrostatic micro-actuator. The nonlinear model of …
designed for set-point regulation of an electrostatic micro-actuator. The nonlinear model of …
A simple learning control to eliminate RF-MEMS switch bounce
JC Blecke, DS Epp, H Sumali… - Journal of …, 2009 - ieeexplore.ieee.org
A learning control algorithm is presented that reduces the closing time of a radio-frequency
microelectromechanical systems switch by minimizing bounce while maintaining robustness …
microelectromechanical systems switch by minimizing bounce while maintaining robustness …
Pull-in-based μg-resolution accelerometer: Characterization and noise analysis
The pull-in time (tpi) of electrostatically actuated parallel-plate microstructures enables the
realization of a high-sensitivity accelerometer that uses time measurement as the …
realization of a high-sensitivity accelerometer that uses time measurement as the …