Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Fractal N/MEMS: from pull-in instability to pull-in stability

D Tian, QT Ain, N Anjum, CH He, B Cheng - Fractals, 2021 - World Scientific
Pull-in instability, as an inherent nonlinear problem, continues to become an increasingly
important and interesting topic in the design of electrostatic Nano/Micro-electromechanical …

MEMS-based microspectrometer technologies for NIR and MIR wavelengths

LP Schuler, JS Milne, JM Dell… - Journal of Physics D …, 2009 - iopscience.iop.org
Commercially manufactured near-infrared (NIR) instruments became available about 50
years ago. While they have been designed for laboratory use in a controlled environment …

Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation

B Sahu, CR Taylor, KK Leang - 2010 - asmedigitalcollection.asme.org
The development of manufacturing tools and processes capable of precisely positioning and
manipulating nanoscale components and materials is still in its embryonic stage …

Stabilization control of a MEMS accelerometer with tuned quasi-zero stiffness

Y Guo, Z Ma, T Zhang, Y **, X Zheng… - IEEE Sensors …, 2021 - ieeexplore.ieee.org
In this paper, a novel MEMS accelerometer with tuned quasi-zero stiffness stabilized and
operated in a closed-loop is proposed. By using the electrostatic softening effect of the …

DC dynamic pull-in predictions for a generalized clamped–clamped micro-beam based on a continuous model and bifurcation analysis

PCP Chao, CW Chiu, TH Liu - Journal of Micromechanics and …, 2008 - iopscience.iop.org
This study is devoted to providing precise predictions of the dc dynamic pull-in voltages of a
clamped–clamped micro-beam based on a continuous model. A pull-in phenomenon occurs …

Pull-in instability of a typical electrostatic MEMS resonator and its control by delayed feedback

H Shang - Nonlinear Dynamics, 2017 - Springer
Pull-in instability of the electrostatic microstructures is a common undesirable phenomenon
which implies the loss of reliability of micro-electromechanical systems. Therefore, it is …

Design of a robust PID-control switching scheme for an electrostatic micro-actuator

M Vagia, G Nikolakopoulos, A Tzes - Control Engineering Practice, 2008 - Elsevier
In this article, a robust switching PID controller coupled to a feedforward compensator is
designed for set-point regulation of an electrostatic micro-actuator. The nonlinear model of …

A simple learning control to eliminate RF-MEMS switch bounce

JC Blecke, DS Epp, H Sumali… - Journal of …, 2009 - ieeexplore.ieee.org
A learning control algorithm is presented that reduces the closing time of a radio-frequency
microelectromechanical systems switch by minimizing bounce while maintaining robustness …

Pull-in-based μg-resolution accelerometer: Characterization and noise analysis

RA Dias, E Cretu, R Wolffenbuttel, LA Rocha - Sensors and Actuators A …, 2011 - Elsevier
The pull-in time (tpi) of electrostatically actuated parallel-plate microstructures enables the
realization of a high-sensitivity accelerometer that uses time measurement as the …