Photons have many advantages for vaporizing condensed systems, and laser vaporization
sources have a flexibility not available with other methods. These sources are applied to …

For the past five decades, bulk niobium (Nb) has been the material of choice for
superconducting RF (SRF) cavity applications. Alternatives such as Nb thin films and other …

An extended structure zone diagram is proposed that includes energetic deposition,
characterized by a large flux of ions typical for deposition by filtered cathodic arcs and high …

General trends in integrated circuit technology toward smaller device dimensions, lower
thermal budgets, and simplified processing steps present severe physical and engineering …

Transparent conductive oxides (TCOs) are degenerately doped compound semiconductors
with wide band gaps (Eg> 3 eV), which are used as transparent electrodes in optoelectronic …

Modern condensed-matter physics is increasingly concerned with the design, synthesis,
analysis, and exploitation of chemically complex materials and structures. Complex metal …

The inclusion of plasma in atomic layer deposition processes generally offers the benefit of
substantially reduced growth temperatures and greater flexibility in tailoring the gas-phase …

Ion beam technologies have made tremendous gains in the commercial sector over the past
two decades. The ion implantation of semiconductors rapidly became an accepted …

A wide-ranging, one-stop resource, the Materials Processing Handbook provides
groundbreaking coverage of processes applied to a myriad of solid materials. It presents the …

One important recent trend in deposition technology is the continuous expansion of
available processes towards higher ion assistance with the subsequent beneficial effects to …