Tutorial: Hysteresis during the reactive magnetron sputtering process
K Strijckmans, R Schelfhout, D Depla - Journal of Applied Physics, 2018 - pubs.aip.org
Reactive magnetron sputtering is a well-established physical vapor technique to deposit thin
compound films on different substrates, ranging from insulating glass windows over wear …
compound films on different substrates, ranging from insulating glass windows over wear …
Pulsed high-density plasmas for advanced dry etching processes
Plasma etching processes at the 22 nm technology node and below will have to satisfy
multiple stringent scaling requirements of microelectronics fabrication. To satisfy these …
multiple stringent scaling requirements of microelectronics fabrication. To satisfy these …
[ספר][B] Physics of radio-frequency plasmas
P Chabert, N Braithwaite - 2011 - books.google.com
Low-temperature radio frequency plasmas are essential in various sectors of advanced
technology, from micro-engineering to spacecraft propulsion systems and efficient sources …
technology, from micro-engineering to spacecraft propulsion systems and efficient sources …
Global model of low-temperature atmospheric-pressure He+ H2O plasmas
A detailed global model of atmospheric-pressure He+ H 2 O plasmas is presented in this
paper. The model incorporates 46 species and 577 reactions. Based on simulation results …
paper. The model incorporates 46 species and 577 reactions. Based on simulation results …
Oxygen discharges diluted with argon: dissociation processes
We use a global (volume averaged) model to study the dissociation processes and the
presence of negative ions and metastable species in a low pressure high density O 2/Ar …
presence of negative ions and metastable species in a low pressure high density O 2/Ar …
Main Species and Physicochemical Processes in Cold Atmospheric‐pressure He + O2 Plasmas
The main species and chemical processes in low‐temperature atmospheric‐pressure He+
O2 plasmas are identified using a comprehensive global model. The simulation results …
O2 plasmas are identified using a comprehensive global model. The simulation results …
Concepts, capabilities, and limitations of global models: A review
For researchers wishing to generate an understanding of complex plasma systems, global
models often present an attractive first step, mainly due to their ease of development and …
models often present an attractive first step, mainly due to their ease of development and …
Global Model of He/O2 and Ar/O2 Atmospheric Pressure Glow Discharges
Atmospheric pressure glow discharges (APGDs) have widespread applications, including
sterilization, cancer cell treatment, deposition, and surface modification due to their rather …
sterilization, cancer cell treatment, deposition, and surface modification due to their rather …
Contrasting characteristics of sub-microsecond pulsed atmospheric air and atmospheric pressure helium–oxygen glow discharges
Glow discharges in air are often considered to be the ultimate low-temperature atmospheric
pressure plasmas for numerous chamber-free applications. This is due to the ubiquitous …
pressure plasmas for numerous chamber-free applications. This is due to the ubiquitous …
Low pressure hydrogen discharges diluted with argon explored using a global model
AT Hjartarson, EG Thorsteinsson… - … Sources Science and …, 2010 - iopscience.iop.org
A steady state global (volume averaged) model is developed for a low pressure (1–100
mTorr) high density hydrogen discharge that is diluted with argon. The electron density …
mTorr) high density hydrogen discharge that is diluted with argon. The electron density …