Materials for microbolometers: vanadium oxide or silicon derivatives

A Voshell, N Dhar, MM Rana - Image Sensing Technologies …, 2017 - spiedigitallibrary.org
Microbolometer arrays are the most used technology in thermal infrared imaging. Recent
progress in materials and fabrication techniques for these devices have sparked much …

[HTML][HTML] Temperature-dependent Raman scattering of the Ge+ GeOx system and its potential as an optical thermometer

AR Zanatta - Results in Physics, 2020 - Elsevier
The phonon behavior of various Ge-based samples has been investigated in great detail.
The study comprised Ge films (amorphous and partially crystallized and alloyed with …

Uncooled two-microbolometer stack for long wavelength infrared detection

A Abdullah, A Koppula, O Alkorjia, M Almasri - Scientific Reports, 2023 - nature.com
We have investigated an uncooled infrared (IR) detector utilizing a dual level architecture.
This was achieved by combining two-microbolometer stack in the vertical direction to …

Correlation between optical properties and chemical composition of sputter-deposited germanium oxide (GeOx) films

NR Murphy, JT Grant, L Sun, JG Jones, R Jakubiak… - Optical Materials, 2014 - Elsevier
Germanium oxide (GeO x) films were grown on (1 0 0) Si substrates by reactive Direct-
Current (DC) magnetron sputter-deposition using an elemental Ge target. The effects of …

Amorphous SixGeyO1− x− y thin films for uncooled infrared microbolometers

ML Hai, Q Cheng, M Hesan, C Qu, EC Kinzel… - Infrared Physics & …, 2018 - Elsevier
This paper presents a detailed characterization of Silicon Germanium Oxide (Si x Ge y O 1−
x− y) thin films for uncooled infrared microbolometers. The films were prepared by RF …

[HTML][HTML] Shape control of cathodized germanium oxide nanoparticles

YA Bioud, E Paradis, A Boucherif, D Drouin… - Electrochemistry …, 2021 - Elsevier
In this paper, hexagonal germanium dioxide (GeO 2) nanostructures with different
morphologies and sizes were successfully synthesized by a simple and fast …

Boron-doped nanocrystalline silicon germanium thin films for uncooled infrared bolometer applications

R Xu, W Li, J He, Y Sun, YD Jiang - Infrared Physics & Technology, 2013 - Elsevier
In this paper, boron-doped nanocrystalline Si0. 78Ge0. 22: H thin film is assessed for use as
resistive sensing layer in uncooled infrared bolometer applications. The silicon germanium …

[HTML][HTML] Electrical, Optical and Thermal Properties of Ge-Si-Sn-O Thin Films

F Vadakepurathu, M Rana - Materials, 2024 - mdpi.com
This work evaluates the electrical, optical and thermal properties of Sn-doped GexSi1-xOy
thin films for use as microbolometer sensing materials. The films were prepared using a …

Metasurface based uncooled microbolometer with high fill factor

O Alkorjia, A Abdullah, A Koppula… - … Conference on Solid …, 2019 - ieeexplore.ieee.org
This paper presents the design, fabrication, characterization, and noise reduction of
metasurface integrated uncooled infrared (IR) microbolometers. The metasurface allows the …

Noise Reduction of Amorphous SixGeyO1–xy Thin Films for Uncooled Microbolometers by Si3N4 Passivation and Annealing in Vacuum

M Jalal, ML Hai, S Ajmera, M Almasri - IEEE Sensors Journal, 2015 - ieeexplore.ieee.org
This paper presents the fabrication and reduction of noise voltage power spectral density
(PSD) of Si x Ge y O 1-xy uncooled infrared microbolometers with four different …