Recently, microelectromechanical system (MEMS) cantilevers have received significant
interest in the domain of Volatile Organic Compounds (VOCs). An analysis of MEMS …

Purpose The purpose of this paper is to provide an overview of the major reliability issues of
microelectromechanical systems (MEMS) under mechanical and environmental loading …

As the key component of aero-engines and industrial gas turbines, a bearing's working
temperature at high speed is close to 300℃. The measurement of an engine bearing's …

Electrothermal actuation is one of the main actuation mechanisms and has been employed
to make scanning microelectromechanical systems (MEMS) mirrors with large scan range …

This paper presents the experimental characterization of the creep effect in electrostatically
actuated gold microstructures. The tested specimens follow the typical configuration of the …

As crucial rotating elements in mechanical apparatuses, the health condition of bearings is
directly correlated with the dependability and safety of the entire system. Consequently, an …

Thermal process is an important factor for metal cantilever profile, which may cause stress
change and degeneration of device reliability. In this paper, prestressing-based thermal …

Thermal microelectromechanical system (MEMS) devices have gained immensely in
popularity due to their good performances, relatively simple fabrication process, and to the …

Cantilevers for use in micro electro mechanical systems, often known as MEMS, have
recently attracted a lot of interest in the area of volatile organic compounds research (VOCs) …

The study of creep in MEMS is crucial for their lifetime prediction and reliability evaluation.
The experimental approaches used in macromechanics can be extended to the microscale if …