This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This paper presents a review of electrothermal micro-actuators and applications.
Electrothermal micro-actuators have been a significant research interest over the last two …

Wide-range humidity sensing and monitoring applications including instrumentation,
agriculture, meteorology, biomedicine, and food processing have attracted long-standing …

Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated
excitation and readout components, exhibit exquisite gravimetric sensitivities which have …

At the microscale, cantilever vibrations depend not only on the microstructure's properties
and geometry but also on the properties of the surrounding medium. In fact, when a …

Microelectromechanical systems (MEMS) thermal-piezoresistive resonator (TPRs) and
thermal-piezoresistive oscillator (TPO) use thermal actuation and realize feedback through …

The development and real-time performance test of a fully integrated low-cost handheld
cantilever-based airborne nanoparticle (NP) detector (CANTOR-2) are described in this …

A generalized reduced order model for resonant viscosity and mass density sensors is
presented and experimentally verified. The reduced expressions for the resonance …

In this work the electrical performance of micromachined piezoelectric cantilevers having
different designs is investigated in liquid environment, thus making most beneficially use of …