This review paper covers a topic of significant importance in micro-and nano-systems
development and manufacturing, specifically the residual stresses in deposited thin-film …

Silicon photonics has emerged as a mature technology that is expected to play a key role in
critical emerging applications, including very high data rate optical communications …

Microelectromechanical systems (MEMS) technologies are evolving at a rapid rate with
increasing activity in the design, fabrication, and commercialization of a wide variety of …

Mechanical characterization of atomic layer deposited (ALD) alumina (Al2O3) for use in
micro-and nano-electromechanical systems has been performed using several …

In parallel with the development of new technologies, new device configurations, and new
applications for microsensors, microactuators, and microsystems, also referred to as …

The initial attraction of polysilicon was the ability to deposit semiconductor layers on a wide
range of substrates. This leads to the development of polysilicon gate MOS, polysilicon …

M-TEST, an electrostatic pull-in approach for the in-situ mechanical property measurements
of microelectromechanical systems (MEMS), is used to extract the Young's modulus and …

A detailed examination of the effects of deposition parameters, using LPCVD, and
subsequent processing on the characteristics of silicon nitride is presented. The properties …

The development of compact light modulators integrated on the same chip as the signal
processing opens many opportunities for combining inter-chip optical communications with …

Micro-electro-mechanical system (MEMS) technology has radically changed the scale,
performance, and cost of a wide variety of sensors and actuators by taking advantage of …