This paper presents a digital gyroscope interface system for high-frequency bulk-acoustic-
wave (BAW) gyroscopes with in-run automatic mode-matching (AMM) capability. The …

The theory of eigenmode operation of Coriolis vibratory gyroscopes and its implementation
on a thin-film piezoelectric gyroscope is presented. It is shown analytically that the modal …

In this paper, a modification to the eigenmode operation of resonant gyroscopes is
introduced. The multi-coefficient eigenmode operation can improve cross-mode isolation …

This paper presents a nano-precision high aspect-ratio poly-and single-crystal silicon DRIE
plus wet-etching fabrication platform, also known as HARPSS+, which enables single-chip …

This paper introduces a novel resonator design for a high-frequency mode-matched pitch (or
roll) gyroscope featuring large excitation amplitude and high Coriolis coupling to address …

In this paper, we propose a novel aluminum nitride on silicon (AlN-on-Si) pitch/roll
gyroscope with piezoelectric driving/sensing and electrostatic mode-match operation. A …

The paper presents a miniaturized pitch/roll gyroscope with the lowest angle random walk
(ARW of 600 μdps/√ Hz) and lowest bias instability (BI of 2.8 dph) ever recorded on planar …

Figure 2.11 AlN-on-Si fabrication process flow.(a) deposit the piezoelectric stack on the SOI
wafer,(b) pattern the top Mo layer,(c) deposit and pattern backside oxide layer,(d) etch AlN …

The theory of eigenmode operation of Coriolis vibratory gyroscopes and its implementation
on a thin-film piezoelectric gyroscope is presented. It is shown analytically that the modal …

High-frequency resonant gyroscope technology developed in recent years promises robust
high performance with mode-matched resonant operation. While high performance is shown …