Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

AZ Hajjaj, N Jaber, S Ilyas, FK Alfosail… - International Journal of …, 2020 - Elsevier
Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

A review on coupled MEMS resonators for sensing applications utilizing mode localization

C Zhao, MH Montaseri, GS Wood, SH Pu… - Sensors and Actuators A …, 2016 - Elsevier
In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

A review on coupled bulk acoustic wave MEMS resonators

L Wang, C Wang, Y Wang, A Quan, M Keshavarz… - Sensors, 2022 - mdpi.com
With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review

V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation

T Rabenimanana, V Walter, N Kacem, P Le Moal… - Sensors and Actuators A …, 2019 - Elsevier
This paper presents a sensor using the mode localization phenomenon to detect a mass
perturbation. It is composed of two cantilevers with different lengths and connected by a …

A comprehensive categorization of micro/nanomechanical resonators and their practical applications from an engineering perspective: a review

N Ghaemi, A Nikoobin… - Advanced Electronic …, 2022 - Wiley Online Library
Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical
resonators, provide an unprecedented platform for investigating a wide range of applications …

Enhancing parametric sensitivity in electrically coupled MEMS resonators

P Thiruvenkatanathan, J Yan… - Journal of …, 2009 - ieeexplore.ieee.org
In an array of identical resonators coupled through weak springs, a small perturbation in the
structural properties of one of the resonators strongly impacts coupled oscillations causing …

Micromechanical mode-localized electric current sensor

H Li, Z Zhang, L Zu, Y Hao, H Chang - Microsystems & …, 2022 - nature.com
This paper outlines the design of a novel mode-localized electric current sensor based on a
mechanically sensitive element of weakly coupled resonator systems. With the advantage of …

Mass sensing based on deterministic and stochastic responses of elastically coupled nanocantilevers

E Gil-Santos, D Ramos, A Jana, M Calleja, A Raman… - Nano …, 2009 - ACS Publications
Coupled nanomechanical systems and their entangled eigenstates offer unique
opportunities for the detection of ultrasmall masses. In this paper we show theoretically and …

Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization

T Rabenimanana, V Walter, N Kacem… - Applied Physics …, 2020 - pubs.aip.org
In order to overcome mode aliasing limitation in linear mode-localized sensors, we
demonstrate in this Letter both theoretically and experimentally how to tune the electrostatic …