Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances
Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …
and exploited in the past few decades for various applications and for probing fundamental …
A review on coupled MEMS resonators for sensing applications utilizing mode localization
In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …
resonators that has the potential of fundamentally transforming MEMS resonant sensors …
A review on coupled bulk acoustic wave MEMS resonators
With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …
State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review
V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …
Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation
This paper presents a sensor using the mode localization phenomenon to detect a mass
perturbation. It is composed of two cantilevers with different lengths and connected by a …
perturbation. It is composed of two cantilevers with different lengths and connected by a …
A comprehensive categorization of micro/nanomechanical resonators and their practical applications from an engineering perspective: a review
N Ghaemi, A Nikoobin… - Advanced Electronic …, 2022 - Wiley Online Library
Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical
resonators, provide an unprecedented platform for investigating a wide range of applications …
resonators, provide an unprecedented platform for investigating a wide range of applications …
Enhancing parametric sensitivity in electrically coupled MEMS resonators
P Thiruvenkatanathan, J Yan… - Journal of …, 2009 - ieeexplore.ieee.org
In an array of identical resonators coupled through weak springs, a small perturbation in the
structural properties of one of the resonators strongly impacts coupled oscillations causing …
structural properties of one of the resonators strongly impacts coupled oscillations causing …
Micromechanical mode-localized electric current sensor
This paper outlines the design of a novel mode-localized electric current sensor based on a
mechanically sensitive element of weakly coupled resonator systems. With the advantage of …
mechanically sensitive element of weakly coupled resonator systems. With the advantage of …
Mass sensing based on deterministic and stochastic responses of elastically coupled nanocantilevers
Coupled nanomechanical systems and their entangled eigenstates offer unique
opportunities for the detection of ultrasmall masses. In this paper we show theoretically and …
opportunities for the detection of ultrasmall masses. In this paper we show theoretically and …
Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
In order to overcome mode aliasing limitation in linear mode-localized sensors, we
demonstrate in this Letter both theoretically and experimentally how to tune the electrostatic …
demonstrate in this Letter both theoretically and experimentally how to tune the electrostatic …