For a high power density in piezoelectric energy harvesters, both a large direct piezoelectric
coefficient (e 31, f) and a small relative permittivity constant (ε r, 33) are required. This study …

Resonant 1D microelectromechanical systems (MEMS) optical scanners actuated by
piezoelectric unimorph actuators with a Nb-doped lead zirconate titanate (PNZT) thin film …

A silicon micromirror driven by piezoelectric Pb (Zr, Ti) O3 beam actuators has been
demonstrated for two-dimensional (2D) scanning mirror applications. Two devices of similar …

A novel dynamic excitation of an S-shaped PZT piezoelectric actuator, which is
conceptualized by having two superimposed AC voltages, is characterized in this paper …

This work proposes a two-dimensional (2-D) laser scanning mirror with a novel actuating
structure composed of one magnet and two coils. The mirror-actuating device generates …

A silicon micromirror driven by piezoelectric Pb (Zr, Ti) O3 cantilever actuator has been
demonstrated for 2-D scanning applications. Two different PZT actuator designs have been …

In this paper, a nonlinear feedback control algorithm is proposed to improve the
performance of an electromagnetic actuated polymer MEMS hard-magnetic micromirror. The …

In this paper, we present the design, fabrication and measurement results of a 2D scanning
mirror actuated by 1× 10 piezoelectric Pb (Zr, Ti) O 3 (PZT) cantilever actuators integrated on …

Dynamic behavior of magnetic thin film actuators is investigated in detail and applied to
various laser scanning applications. Magnetic hysteresis effects are incorporated into the …

Design, Fabrication and Testing of a Polymer Composite Based Hard-Magnetic Mirror for
Biomedical Scanning Applications - IOPscience Skip to content IOP Science home Accessibility …