Fabrication of 2D CMUT Arrays on a Borosilicate Glass Substrate With Silicon-Through-Wafer Interconnects Using Non-Aligned and Aligned Anodic Bonding‏

M Annayev, AÖ Biliroğlu, E Şennik… - Journal of …, 2024‏ - ieeexplore.ieee.org‏
2D arrays are crucial for develo** compact and efficient 3D ultrasound systems.
Capacitive micromachined ultrasonic transducer (CMUT) arrays, providing convenient …‏
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