MEMS resonators for frequency reference and timing applications

G Wu, J Xu, EJ Ng, W Chen - Journal of …, 2020 - ieeexplore.ieee.org
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

Model order reduction based on direct normal form: application to large finite element MEMS structures featuring internal resonance

A Opreni, A Vizzaccaro, A Frangi, C Touzé - Nonlinear Dynamics, 2021 - Springer
Dimensionality reduction in mechanical vibratory systems poses challenges for distributed
structures including geometric nonlinearities, mainly because of the lack of invariance of the …

Direct detection of Akhiezer dam** in a silicon MEMS resonator

J Rodriguez, SA Chandorkar, CA Watson, GM Glaze… - Scientific reports, 2019 - nature.com
Abstract Silicon Microelectromechanical Systems (MEMS) resonators have broad
commercial applications for timing and inertial sensing. However, the performance of MEMS …

Nonlinear dam** in micromachined bridge resonators

H Farokhi, RT Rocha, AZ Hajjaj, MI Younis - Nonlinear Dynamics, 2023 - Springer
This study presents a thorough theoretical and experimental investigation on the nonlinear
dam** of in-plane micromachined electromechanical resonators. More specifically …

Thermoelastic dam** in MEMS gyroscopes at high frequencies

D Schiwietz, EM Weig… - Microsystems & …, 2023 - nature.com
Microelectromechanical systems (MEMS) gyroscopes are widely used, eg, in modern
automotive and consumer applications, and require signal stability and accuracy in rather …

High-quality factor Ta2O5-on-insulator resonators with ultimate thermal stability

J Rasmus Bankwitz, MA Wolff, AS Abazi, PM Piel… - Optics Letters, 2023 - opg.optica.org
Experiments in photonics, laser optics, and quantum technology require low-loss, thermal,
and mechanical stability. While photonic integrated circuits on monolithic chips achieve …

Quantification of energy dissipation mechanisms in toroidal ring gyroscope

Y Wang, YW Lin, J Glaze, GD Vukasin… - Journal of …, 2021 - ieeexplore.ieee.org
We present a study on the quantification of energy dissipation of Micro-Electro-Mechanical
System (MEMS) resonators. Toroidal Ring Gyroscope (TRG) was used as a platform to …

Computational analysis of TiC3 as a high-efficiency anode for calcium-ion batteries

J Park, SA Fatima - Journal of Energy Storage, 2024 - Elsevier
A comprehensive analysis of the structural, electronic, and thermal properties of TiC 3 has
been conducted. The calculated thermal expansion coefficient throughout a significant …

Anchor loss reduction for square-extensional mode MEMS resonator using tethers with auxiliary structures

W Chen, W Jia, Y **ao, G Wu - IEEE Sensors Journal, 2023 - ieeexplore.ieee.org
In this article, a new approach by introducing auxiliary structures in the tethers of a
microelectromechanical system (MEMS) resonator is presented to reduce anchor loss. A …

Method for optimising the performance of PML in anchor‐loss limited model via COMSOL

P Li, JY Ou, J Yan - IET Science, Measurement & Technology, 2022 - Wiley Online Library
Perfectly matched layer has been used for solving anchor‐loss limited quality factor in the
Micro electromechanical systems. However, setting up a well‐behaved perfectly matched …