Considering microbotics, microforce sensing, their working environment, and their control
architecture together, microrobotic force-sensing systems provide the potential to outperform …

The present review provides information relevant to issues and challenges in MEMS testing
techniques that are implemented to analyze the microelectromechanical systems (MEMS) …

Nanotechnology is the branch of science which deals with the manipulation of matters at an
extremely high resolution down to the atomic level. In recent years, atomic force microscopy …

In most nanotechnology applications, speed and precision are important requirements for
obtaining good topographical maps of material surfaces using atomic force microscopes …

This paper presents a novel double-actuator position-feedback mechanism for micro electro-
mechanical electrostatic-capacitive force sensors. Compared to a single-actuator position …

Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional
implementation as a relatively costly macroscale system is a barrier to its more widespread …

We report the design, characterization, and control of a high-bandwidth
microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force …

This article presents a novel vertical positioning stage with a dual-sensor arrangement
suitable for scanning probe microscopy. The stage has a travel range of 8.4 μm and a first …

We demonstrate the application of internal model control for accurate tracking of spiral scan
trajectories, where the reference signals are orthogonal sinusoids whose amplitudes linearly …