In this paper, trends from the last 10 years of inertial micro-generator literature are
investigated and it is shown that, although current generator designs are still operating well …

Microactuators are emerging as important tools that are capable of performing the tasks of
conventional tools in the macroworld, but they are much smaller and allow greater precision …

This study is devoted to providing precise predictions of the dc dynamic pull-in voltages of a
clamped–clamped micro-beam based on a continuous model. A pull-in phenomenon occurs …

Compliant manipulators are advanced robotic systems articulated by the flexure joints to
deliver highly repeatable motion. Using the advantage of elastic deflection, these flexure …

An integrated micro XY-stage with a 2× 2 mm 2 movable table is designed and fabricated for
application in nanometer-scale operation and nanometric positioning precision. The device …

The standard approach to vibrational control applies first-order averaging methods to find an
open-loop periodic input that stabilizes an unstable equilibrium point. While the capability of …

A variable attenuator is one of the essential components in radio frequency (RF) systems,
such as automatic gain control amplifiers and full-duplex systems. Variable attenuators …

This paper presents a design of a comb finger shape and calculation of a trapezoidal-
shaped electrostatic comb-drive actuator (TECA) in order to aim a higher electrostatic force …

2. Description of Related Art Micro Electro-Mechanical Systems (MEMS) refers to the
integration of mechanical elements, sensors, actuators and electronics on a common silicon …

Capacitive comb actuators are widely used as MEMS motors due to their long range of
linear motion, low power consumption, and ease of fabrication. Here, we present data from a …