In this paper, we developed a multi-physics model of an electrostatic MEMS resonator made
of an array of mechanically-coupled beams and investigate its potential use for mass …

A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this
paper, which can simultaneously detect two different physical stimuli by monitoring the …

In the present study, an expanded dynamic model of an electrostatically actuated double
beam metastructure, composed of geometrically different beams, is formulated and solved …

In the past few decades, advances in micro-electromechanical systems (MEMS) have
produced robust, accurate, and high-performance devices. Extensive research has been …

This paper investigated the mechanical performance of an electrostatically tunable
microbeams-based resonators. The resonator was designed based on two initially-curved …

This paper reports a novel Aluminium-Nitride (AlN)-based piezoelectric micromachined gas
sensor relying on thermal energy dissipation (heating or cooling) of an electrically heated …