Compact electrodynamics MEMS-speaker

BY Majlis, G Sugandi, MM Noor - 2017 China Semiconductor …, 2017 - ieeexplore.ieee.org
This paper describes the design, fabrication and characterization of an electrodynamic
MEMS speaker. The miniaturized speaker consists of a deposited single turn microcoil on a …

A novel structure of electromagnetic MEMS speaker for hearing aid application

A Setiarini, G Sugandi, YN Wijayanto… - … on Radar, Antenna …, 2018 - ieeexplore.ieee.org
A novel structure for this microspeaker is composed of permanent magnet Neodymium Iron
Boron (NdFeB) with the magnetization of 1.42 T, diameter 1.6 mm, a thickness 0.8 mm is …

Optimization of induced voltage from CMOS-compatible MEMS electrodynamic microphone with coaxial planar inductances

F Tounsi, MH Said, L Rufer, B Mezghani… - IEEE Sensors …, 2016 - ieeexplore.ieee.org
This paper presents an improved design of the electrodynamic CMOS-MEMS microphone.
The studied microphone is based on two integrated concentric planar inductors, a fixed …

Characterization of embedded membrane in corrugated silicon microphones for high-frequency resonance applications

RZ Auliya, MR Buyong, B Yeop Majlis… - Microelectronics …, 2019 - emerald.com
Purpose The purpose of this paper is to propose an alternative approach to improve the
performance of microelectromechanical systems (MEMSs) silicon (Si) condenser …

[PDF][PDF] Sensitivity and performances analysis of a dynamic pressure narrow-band electrodynamic micro-sensor

MH Said, F Tounsi, L Rufer, B Mezghani… - Int J Acoust …, 2020 - researchgate.net
This paper presents analytic and numerical modelling of a MEMS electrodynamic micro-
sensor of dynamic pressure. Two coaxial planar inductors of different diameters are used in …

Micro-heater filament on polyimide membrane for gas sensor applications

MM Noor, G Sugandi, BY Majlis - 2012 10th IEEE International …, 2012 - ieeexplore.ieee.org
Micro-heater filaments on polyimide membrane for micro gas sensors are fabricated and
measured. Resistance as well as power consumption are calculated and temperature of the …

[LIBRO][B] Magnetostriktive Mikroaktoren und deren Anwendung als Mikrolautsprecher

TS Albach - 2013 - search.proquest.com
Abstract Mikroelektromechanisch hergestellte Mikrofone (MEMS-Mikrofone) sind heutzutage
millionenfach in Unterhaltungselektronik und Mobiltelefonen anzutreffen. Sie sind klein …

Dynamic Performance of a Narrow Frequency Band Acoustic Microsensor

MH Said, F Tounsi, L Rufer, B Mezghani… - Sensors, Circuits & …, 2018 - degruyter.com
In this paper, we present a dynamic modeling of a MEMS microsensor based on
electrodynamic transduction, using both analytic and finite element analysis. Two coaxial …

[CITAS][C] Magnetostriktive mikroaktoren und deren anwendung als mikrolautsprecher: Magnetostrictive microactuators and their use as microloudspeakers

TS Albach - 2013 - Ph. D. dissertation, Univ. Erlangen …