Fabrication of thin-film silicon membranes with phononic crystals for thermal conductivity measurements

M Haras, V Lacatena, TM Bah… - IEEE Electron …, 2016 - ieeexplore.ieee.org
Thermoelectricity struggles with the lack of cheap, abundant, and environmentally friendly
materials. Silicon could overcome this deficiency by proposing high harvested power …

A CMOS compatible thermoelectric device made of crystalline silicon membranes with nanopores

TM Bah, S Didenko, D Zhou, T Zhu, H Ikzibane… - …, 2022 - iopscience.iop.org
Herein, we report the use of nanostructured crystalline silicon as a thermoelectric material
and its integration into thermoelectric devices. The proof-of-concept relies on the partial …

[HTML][HTML] High speed e-beam lithography for gold nanoarray fabrication and use in nanotechnology

J Trasobares, F Vaurette, M François… - Beilstein Journal of …, 2014 - beilstein-journals.org
E-beam lithography has been used for reliable and versatile fabrication of sub-15 nm single-
crystal gold nanoarrays and led to convincing applications in nanotechnology. However, so …

Heat transport in phononic-like membranes: Modeling and comparison with modulated nano-wires

M Verdier, D Lacroix, K Termentzidis - … Journal of Heat and Mass Transfer, 2017 - Elsevier
The thermal conductivity of phononic-like membranes and their analogous nano-wires are
computed with both Molecular Dynamics and Monte Carlo simulations. Using both methods …

Thermal conductivity of irradiated porous silicon down to the oxide limit investigated by Raman thermometry and scanning thermal microscopy

AM Massoud, PO Chapuis, B Canut… - Journal of Applied …, 2020 - pubs.aip.org
Irradiating porous silicon is expected to reduce thermal conductivity without altering the
porous structure and can be studied by optical techniques provided that optical properties …

Influence of amorphous layers on the thermal conductivity of phononic crystals

M Verdier, D Lacroix, S Didenko, JF Robillard… - Physical Review B, 2018 - APS
The impact of amorphous phases around the holes and at the upper and lower free surfaces
on thermal transport in silicon phononic membranes is studied. By means of molecular …

[HTML][HTML] Heat dissipation in partially perforated phononic nano-membranes with periodicities below 100 nm

AM Massoud, V Lacatena, M Haras, E Dubois… - APL Materials, 2022 - pubs.aip.org
Understanding how thermal-phonon paths can be shaped is key for controlling heat
dissipation at the nanoscale. Thermophononic crystals are periodic porous nanostructures …

Toward quantitative modeling of silicon phononic thermocrystals

V Lacatena, M Haras, JF Robillard, S Monfray… - Applied Physics …, 2015 - pubs.aip.org
The wealth of technological patterning technologies of deca-nanometer resolution brings
opportunities to artificially modulate thermal transport properties. A promising example is …
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BA Kazanowska, AM Dangerfield, H Wang… - Journal of Vacuum …, 2024 - pubs.aip.org
Semiconductor manufacturing depends on the development of new processes, advanced
patterning, and novel materials to create smaller and higher performing devices to follow the …

Single-Crystal Silicon Thermoelectrics by Phonon Engineering

TM Bah, S Didenko, D Zhou, T Zhu, H Ikzibane… - arxiv preprint arxiv …, 2022 - arxiv.org
Herein, we report the use of nanostructured crystalline Si as a thermoelectric material and its
integration into thermoelectric harvesters. The proof-of-concept relies on the partial …