MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio
Frequency systems (ie RF-MEMS) has emerged in the last 10-15 years as a valuable and …

This article presents a resonant micro-pressure sensor consisted of the resonators
positioned on device layer of SOI wafer, which was vacuum packaged by a glass-silicon …

As a warm-blooded creature, human has always needed to keep the variations of the
temperature of his body limited in different environmental conditions. The use of cloth and …

This paper presents the design of the interface circuit for a novel MEMS-based vacuum
measurement system topology. The system is designed to target a vacuum range from 10 to …

This paper presents an electronic interface architecture for frequency domain capacitive and
resonant sensors. The architecture provides temperature compensation without needing a …

Using an integrated micro-heater and a phase-locked loop (PLL) configuration, a technique
to create a temperature-insensitive area on a die is described. The proposed PLL …

This thesis focuses on the design of a low power ultra wideband (UWB) transceiver and a
low power sensor interface architecture, both for use in wireless sensor networks. Pulse …

This work focuses on the interface circuitry design for MEMS resonator-based vacuum
sensors. Two new measurement system topologies are proposed. The required …