Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate
microstructures for various applications in the field of microelectromechanical systems …

Wet anisotropic etching based silicon micromachining is an important technique to fabricate
freestanding (eg cantilever) and fixed (eg cavity) structures on different orientation silicon …

Microelectromechanical systems (MEMS)-based sensors and actuators have become
remarkably popular in the past few decades. Rapid advances have taken place in terms of …

In this paper, the structure of silicon crystal and the course of anisotropic etching have been
presented in a simple way. Connections between etching anisotropy and surface …

Wet bulk micromachining is a popular technique for the fabrication of microstructures in
research labs as well as in industry. However, increasing the throughput still remains an …

This study highlights an innovative technique to optimize surface characteristics for backside
silicon removal in three-dimensional (3D) integration. Following the grinding process, the …

Potassium hydroxide (KOH) and tetramethylammonium hydroxide (TMAH) are most
extensively used etchants for wet anisotropic etching process. Amongst these two etchants …

Squares and circles are basic patterns for most mask designs of silicon microdevices.
Evolution of etched Si crystallographic planes defined by square and circle patterns in the …

Tensioactive compounds, such monohydric or polyhydric alcohols cause that with an
increase in their concentration in solutions, surface tension at the liquid-gas interface–γ LG …

Wet etching of Si substrate enables fabrication of sophisticated Si microstructures for a
number of applications. However, the detailed anisotropic etching behavior of Si in the …