Integrated optical sensors have become important in recent years since they are the only
technology which allows the direct detection of biomolecular interactions. Moreover, silicon …

Silicon oxynitride films were deposited by plasma-enhanced chemical vapor deposition at
low temperatures using nitrous oxide (N2O) and silane (SiH4) as gas precursors. The …

The theoretical design, fabrication and characterisation of an evanescent field integrated
optical (IO) sensor based on a rib anti-resonant reflecting optical waveguide (ARROW) …

In this paper simulated single and double layer anti-reflective coatings based on the
refractive index limits of silicon nitride (SiN) and silicon oxide (SiO/sub 2/) are presented …

Silicon based antiresonant reflecting optical waveguides (ARROW's) have been designed in
order to obtain a high sensitive optical transducer for sensing applications. The designed …

The results of the fabrication and characterization of silicon oxynitride films deposited by the
plasma-enhanced chemical vapor deposition (PECVD) technique at low temperature and …

The development of an evanescent field sensor with an integrated Mach-Zehnder
interferometric (MZI) configuration requires the fabrication of optical waveguides with two …

Inorganic–organic hybrid polymers have been developed and tested for evaluation in optical
and electrical applications. Although hybrid inorganic–organic polymers can be synthesized …

In this work we study the structural properties and mechanical stress of silicon oxynitride
(SiOxNy) films obtained by plasma enhanced chemical vapor deposition (PECVD) …

This paper reports the development of an electrothermal microelectromechanical systems
(MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing …