A review of micro-scale focused ion beam milling and digital image correlation analysis for residual stress evaluation and error estimation

AJG Lunt, AM Korsunsky - Surface and coatings technology, 2015‏ - Elsevier
In the past decade several versions of micro-scale residual stress analysis techniques have
been developed based on Focused Ion Beam (FIB) milling at sample surface followed by …

A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

Kurmendra, R Kumar - Microsystem Technologies, 2021‏ - Springer
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches

JJ Percy, S Kanthamani - Microelectronics Journal, 2023‏ - Elsevier
Abstract Micro Electro Mechanical System (MEMS) technology revolutionized electronics by
enabling miniaturization and integration of components like sensors, actuators, & switches …

Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation

M Li, J Zhao, Z You, G Zhao - Solid-State Electronics, 2017‏ - Elsevier
In this paper, we have developed an electrostatic driven capacitive RF MEMS switch. The
actuation voltage is applied to the actuation electrodes, and the DC voltage is isolated from …

A systematic review of reliability issues in RF-MEMS switches

MM Saleem, H Nawaz - Micro and Nanosystems, 2019‏ - ingentaconnect.com
The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …

Voltage–amplitude response of superharmonic resonance of second order of electrostatically actuated MEMS cantilever resonators

DI Caruntu, MA Botello… - Journal of …, 2019‏ - asmedigitalcollection.asme.org
This paper investigates the voltage–amplitude response of superharmonic resonance of
second order (order two) of alternating current (AC) electrostatically actuated …

Multiphysics design optimization of RF-MEMS switch using response surface methodology

S Younis, MM Saleem, M Zubair, SMT Zaidi - Microelectronics Journal, 2018‏ - Elsevier
This paper presents the multi-objective geometric design exploration and optimization of an
electrostatic Symmetric Toggle RF-MEMS switch (STS), considering both the …

Oxidation-induced changes of mechanochemical reactions at GaAs–SiO2 interface: The competitive roles of water adsorption, mechanical property, and oxidized …

J Gao, C **ao, C Feng, L Wu, B Yu, L Qian… - Applied Surface …, 2021‏ - Elsevier
Mechanochemical reactions at gallium arsenide-silica (GaAs-SiO 2) interface in micro-/nano-
scales during ultra-precision manufacturing process offer novel phenomena of fundamental …

Modeling of triboelectric charge accumulation dynamics at the metal–insulator interface for variable capacitive structures: application to triboelectric nanogenerators

A Ghaffarinejad, J Yavand Hasani - Applied Physics A, 2019‏ - Springer
This paper presents a dynamic model to study triboelectric charge accumulation in a
variable capacitive structure with metal–dielectric interface. The presented model addresses …

Influence of design and fabrication on RF performance of capacitive RF MEMS switches

A Persano, F Quaranta, G Capoccia, E Proietti… - Microsystem …, 2016‏ - Springer
Shunt capacitive radio-frequency microelectromechanical system (RF MEMS) switches were
fabricated on silicon substrate and characterized in the RF domain. Various switch …