A review of micro-scale focused ion beam milling and digital image correlation analysis for residual stress evaluation and error estimation
In the past decade several versions of micro-scale residual stress analysis techniques have
been developed based on Focused Ion Beam (FIB) milling at sample surface followed by …
been developed based on Focused Ion Beam (FIB) milling at sample surface followed by …
A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …
of mechanical structure, actuation methods, and types of contact and circuit configurations …
Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches
Abstract Micro Electro Mechanical System (MEMS) technology revolutionized electronics by
enabling miniaturization and integration of components like sensors, actuators, & switches …
enabling miniaturization and integration of components like sensors, actuators, & switches …
Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation
M Li, J Zhao, Z You, G Zhao - Solid-State Electronics, 2017 - Elsevier
In this paper, we have developed an electrostatic driven capacitive RF MEMS switch. The
actuation voltage is applied to the actuation electrodes, and the DC voltage is isolated from …
actuation voltage is applied to the actuation electrodes, and the DC voltage is isolated from …
A systematic review of reliability issues in RF-MEMS switches
The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …
related to both the electrical and mechanical domains. The development of test standards …
Voltage–amplitude response of superharmonic resonance of second order of electrostatically actuated MEMS cantilever resonators
This paper investigates the voltage–amplitude response of superharmonic resonance of
second order (order two) of alternating current (AC) electrostatically actuated …
second order (order two) of alternating current (AC) electrostatically actuated …
Multiphysics design optimization of RF-MEMS switch using response surface methodology
This paper presents the multi-objective geometric design exploration and optimization of an
electrostatic Symmetric Toggle RF-MEMS switch (STS), considering both the …
electrostatic Symmetric Toggle RF-MEMS switch (STS), considering both the …
Oxidation-induced changes of mechanochemical reactions at GaAs–SiO2 interface: The competitive roles of water adsorption, mechanical property, and oxidized …
Mechanochemical reactions at gallium arsenide-silica (GaAs-SiO 2) interface in micro-/nano-
scales during ultra-precision manufacturing process offer novel phenomena of fundamental …
scales during ultra-precision manufacturing process offer novel phenomena of fundamental …
Modeling of triboelectric charge accumulation dynamics at the metal–insulator interface for variable capacitive structures: application to triboelectric nanogenerators
This paper presents a dynamic model to study triboelectric charge accumulation in a
variable capacitive structure with metal–dielectric interface. The presented model addresses …
variable capacitive structure with metal–dielectric interface. The presented model addresses …
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
Shunt capacitive radio-frequency microelectromechanical system (RF MEMS) switches were
fabricated on silicon substrate and characterized in the RF domain. Various switch …
fabricated on silicon substrate and characterized in the RF domain. Various switch …