Microfluidics based point‐of‐care diagnostics

CM Pandey, S Augustine, S Kumar… - Biotechnology …, 2018 - Wiley Online Library
Point‐of‐care (POC) diagnostic devices have been predicted to provide a boon in health
care especially in the diagnosis and detection of diseases. POC devices have been found to …

Micro total analysis systems. 1. Introduction, theory, and technology

DR Reyes, D Iossifidis, PA Auroux, A Manz - Analytical chemistry, 2002 - ACS Publications
The area of micro total analysis systems, also called “lab on a chip”, or miniaturized analysis
systems, is growing rapidly. Since the excellent research documented in many publications …

Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem—a review

P Abgrall, AM Gue - Journal of micromechanics and …, 2007 - iopscience.iop.org
Microfluidics is an emerging field that has given rise to a large number of scientific and
technological developments over the last few years. This review reports on the use of …

A practical guide for the fabrication of microfluidic devices using glass and silicon

C Iliescu, H Taylor, M Avram, J Miao, S Franssila - Biomicrofluidics, 2012 - pubs.aip.org
This paper describes the main protocols that are used for fabricating microfluidic devices
from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their …

Silicon micromachined hollow microneedles for transdermal liquid transport

HJGE Gardeniers, R Luttge… - Journal of …, 2003 - ieeexplore.ieee.org
This paper presents a novel process for the fabrication of out-of-plane hollow microneedles
in silicon. The fabrication method consists of a sequence of deep-reactive ion etching …

[HTML][HTML] Recent advancements in microfluidic-based biosensors for detection of genes and proteins: applications and techniques

S Siavashy, M Soltani, S Rahimi, M Hosseinali… - … and Bioelectronics: X, 2024 - Elsevier
This article has tried to provide an overview of the most sophisticated microfluidic biosensors
for identifying nucleic acids and proteins at the site of treatment. Microfluidics, which also …

Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE …

HV Jansen, MJ De Boer, S Unnikrishnan… - Journal of …, 2009 - iopscience.iop.org
An intensive study has been performed to understand and tune deep reactive ion etch
(DRIE) processes for optimum results with respect to the silicon etch rate, etch profile and …

Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro-and nanostructures

F Marty, L Rousseau, B Saadany, B Mercier… - Microelectronics …, 2005 - Elsevier
Different processes involving an inductively coupled plasma reactor are presented either for
deep reactive ion etching or for isotropic etching of silicon. On one hand, high aspect ratio …

Semiconductor substrates with unitary vias and via terminals, and associated systems and methods

KK Kirby, KR Parekh - US Patent 8,030,780, 2011 - Google Patents
BACKGROUND Packaged semiconductor dies, including memory chips, microprocessor
chips, and imager chips, typically include a semiconductor die mounted to a Substrate and …

Deep reactive ion etching

F Laermer, S Franssila, L Sainiemi, K Kolari - Handbook of silicon based …, 2020 - Elsevier
This chapter discusses reactive ion etching (RIE) and deep RIE (DRIE) on wafers detailing
the various equipment and reactor requirements for different applications. The Bosch …