Modeling and control of piezo-actuated nanopositioning stages: A survey

GY Gu, LM Zhu, CY Su, H Ding… - IEEE Transactions on …, 2014 - ieeexplore.ieee.org
Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

Recent trends in mechanical micropumps and their applications: A review

S Mohith, PN Karanth, SM Kulkarni - Mechatronics, 2019 - Elsevier
In recent years micropump technology has gained considerable importance and has
become the highlighted area of research particularly for microfluidic applications. The …

Progresses in tensile, torsional, and multifunctional soft actuators

M Zou, S Li, X Hu, X Leng, R Wang… - Advanced Functional …, 2021 - Wiley Online Library
Soft actuators have received intensive attention in the fields of soft robots, sensors,
intelligent control, artificial intelligence, and visual intelligence. By combination of tensile …

Piezoelectric inertia motors—A critical review of history, concepts, design, applications, and perspectives

M Hunstig - Actuators, 2017 - mdpi.com
Piezoelectric inertia motors—also known as stick-slip motors or (smooth) impact drives—use
the inertia of a body to drive it in small steps by means of an uninterrupted friction contact. In …

Biomedical soft robots: current status and perspective

T Ashuri, A Armani, R Jalilzadeh Hamidi… - Biomedical Engineering …, 2020 - Springer
This paper reviews the current status of soft robots in biomedical field. Soft robots are made
of materials that have comparable modulus of elasticity to that of biological systems. Several …

New flexure parallel-kinematic micropositioning system with large workspace

Q Xu - IEEE Transactions on Robotics, 2011 - ieeexplore.ieee.org
Flexure-based micropositioning systems with a large workspace are attractive for a variety of
precision engineering applications. In this paper, a new idea of multistage compound …

Robust impedance control of a compliant microgripper for high-speed position/force regulation

Q Xu - IEEE transactions on industrial electronics, 2014 - ieeexplore.ieee.org
High-speed simultaneous position and contact force control is vital for microgrippers
dedicated to automated high-throughput microassembly tasks. This paper presents the …

Piezo-actuated smart mechatronic systems: Nonlinear modeling, identification, and control

Z Yuan, S Zhou, Z Zhang, Z **ao, C Hong… - … Systems and Signal …, 2024 - Elsevier
Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …

Identification and compensation of piezoelectric hysteresis without modeling hysteresis inverse

Q Xu - IEEE Transactions on Industrial Electronics, 2012 - ieeexplore.ieee.org
This paper presents a new approach for hysteresis identification and compensation of
piezoelectric actuators by resorting to an intelligent hysteresis model. In particular, a least …

Rate-dependent hysteresis modeling and control of a piezostage using online support vector machine and relevance vector machine

PK Wong, Q Xu, CM Vong… - IEEE Transactions on …, 2011 - ieeexplore.ieee.org
Hysteresis nonlinearity degrades the positioning accuracy of a piezostage and requires a
suppression for precision micro-/nanopositioning applications. This paper proposes two new …