The development of micromachined gyroscope structure and circuitry technology
D **a, C Yu, L Kong - Sensors, 2014 - mdpi.com
This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …
An automatically mode-matched MEMS gyroscope with wide and tunable bandwidth
This paper presents the architecture and experimental verification of the automatic mode-
matching system that uses the phase relationship between the residual quadrature and …
matching system that uses the phase relationship between the residual quadrature and …
Design and development of a MEMS vibrating ring resonator with inner rose petal spring supports
This paper presents a novel MEMS based ring resonator design inspired by the rose petal
structure. The proposed design has four petal springs supporting the ring structure …
structure. The proposed design has four petal springs supporting the ring structure …
Design and implementation of an optimized double closed-loop control system for MEMS vibratory gyroscope
F Chen, W Yuan, H Chang, G Yuan, J **e… - IEEE Sensors …, 2013 - ieeexplore.ieee.org
This paper describes the development and experimental evaluation of a
microelectromechanical system vibratory gyroscope using an optimized double closed-loop …
microelectromechanical system vibratory gyroscope using an optimized double closed-loop …
An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth
This paper presents the architecture and experimental verification of an automatic mode
matching system that uses the phase relationship between the residual quadrature and …
matching system that uses the phase relationship between the residual quadrature and …
Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors
This paper presents a novel single-ring resonator design and experimentally demonstrates
its dynamic behavior. The proposed ring resonator design is simple and has a solid anchor …
its dynamic behavior. The proposed ring resonator design is simple and has a solid anchor …
A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique
W Ma, Y Lin, S Liu, X Zheng, Z ** - Journal of Micromechanics …, 2016 - iopscience.iop.org
This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using
a modified electromechanical amplitude modulation (MEAM) technique, which enhances the …
a modified electromechanical amplitude modulation (MEAM) technique, which enhances the …
Design of oscillation control loop with coarse-precision mode transition for solid-state resonant gyroscope
JW Song, HM Song, YJ Lee, CG Park… - IEEE Sensors …, 2015 - ieeexplore.ieee.org
This paper presents a dual mode oscillation control loop design for a solid-state
hemispherical resonator gyroscope (HRG) which uses the hemispherical vibrating shell for …
hemispherical resonator gyroscope (HRG) which uses the hemispherical vibrating shell for …
The stabilization system of primary oscillation for a micromechanical gyroscope
P Baranov, T Nesterenko, E Tsimbalist… - Measurement Science …, 2017 - iopscience.iop.org
The mode of primary oscillations of a micromechanical gyroscope (MMG) sensor is provided
by an electrostatic comb-drive actuator in which the interaction between the …
by an electrostatic comb-drive actuator in which the interaction between the …
Compensation methos for quasi-static acceleration sensitivity of MEMS gyroscopes
HD Gavcar - 2014 - open.metu.edu.tr
This thesis presents the quasi-static acceleration compensation methods for a fully
decoupled MEMS gyroscope. These methods are based on the utilization of the amplitude …
decoupled MEMS gyroscope. These methods are based on the utilization of the amplitude …