Optical wafer defect inspection at the 10 nm technology node and beyond
The growing demand for electronic devices, smart devices, and the Internet of Things
constitutes the primary driving force for marching down the path of decreased critical …
constitutes the primary driving force for marching down the path of decreased critical …
Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications
Mueller matrix ellipsometry (MME) provides the 4× 4 Mueller matrix of a sample under test,
which determines how the state of polarization is changed as light interacts with the sample …
which determines how the state of polarization is changed as light interacts with the sample …
[HTML][HTML] Map** spectroscopic micro-ellipsometry with sub-5 microns lateral resolution and simultaneous broadband acquisition at multiple angles
Spectroscopic ellipsometry is a widely used optical technique in both industry and research
for determining the optical properties and thickness of thin films. The effective use of …
for determining the optical properties and thickness of thin films. The effective use of …
Polarized angle-resolved spectral reflectometry for real-time ultra-thin film measurement
We propose a polarized, angle-resolved spectral (PARS) reflectometry for simultaneous
thickness and refractive-index measurement of ultra-thin films in real time. This technology …
thickness and refractive-index measurement of ultra-thin films in real time. This technology …
Analyzing the influence of imaging resolution on polarization properties of scattering media obtained from Mueller matrix
The Mueller matrix contains abundant micro-and even nanostructural information of media.
Especially, it can be used as a powerful tool to characterize anisotropic structures …
Especially, it can be used as a powerful tool to characterize anisotropic structures …
[HTML][HTML] A method for measuring and calibrating the thickness of thin films based on infrared interference technology
J Sun, X Li, H Zhang, J Song, Z Li - Results in Physics, 2023 - Elsevier
Transparent thin films are critical industrial components widely used in advanced optics,
microelectronics and materials science, among other relevant fields. The rapid and stable …
microelectronics and materials science, among other relevant fields. The rapid and stable …
A review on optical characterization of refractive index in photonic related devices and applications
As one of the most important optical properties of a material, refractive index (RI) and its
spatial distribution play important roles in managing the performances of photonic structures …
spatial distribution play important roles in managing the performances of photonic structures …
[HTML][HTML] High precision micro-ellipsometry based on a pixelated polarizing camera
DG Yang, YS Ghim, HG Rhee - Optics and Lasers in Engineering, 2024 - Elsevier
Micro-ellipsometry, an on-axis optical configuration, offers submicron spatial resolution
compared to conventional ellipsometry. However, its lower precision, inaccurate system …
compared to conventional ellipsometry. However, its lower precision, inaccurate system …
[HTML][HTML] Optical properties of polyaniline/modified graphene oxide nanocomposites
LV Davoise, RP Capilla, AM Díez-Pascual - Materials Today …, 2023 - Elsevier
In this research, the complex refractive index of polyaniline (PANI)/hexamethylene
diisocyanate-modified graphene oxide (HDI-GO) nanocomposites has been obtained. The …
diisocyanate-modified graphene oxide (HDI-GO) nanocomposites has been obtained. The …
[HTML][HTML] Selecting the best surface analysis method for your materials/samples
There are a large number of surface analytical methods, each with their own strengths and
limitations. This review provides tools and an amalgamated source of information to those …
limitations. This review provides tools and an amalgamated source of information to those …