EUV mask technologies: evolution and ecosystem for devices
J Choi - Photomask Technology 2024, 2024 - spiedigitallibrary.org
For the innovation of DRAM and Logic semiconductors, EUV lithography and mask
technology have played a crucial role. This paper shifts the focus of technological innovation …
technology have played a crucial role. This paper shifts the focus of technological innovation …
Requirements and strategies of High-NA EUV mask using MBMW
Y Cho, I Noh, J Park, B Ahn, H Kim… - Photomask …, 2024 - spiedigitallibrary.org
High-resolution EUV mask patterning capability has been one of the key factors to enable
sub-10nm nanofabrication. Especially, the emergence of the Multi-Beam Mask writer …
sub-10nm nanofabrication. Especially, the emergence of the Multi-Beam Mask writer …