With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

Extensive development of micro/nano-electromechanical systems (MEMS/NEMS) has
resulted in technologies that exhibit excellent performance over a wide range of applications …

Abstract Two-dimensional (2D) magnets offer valuable electrical and mechanical properties,
and could be used to create 2D nanoelectromechanical systems. However, the low Curie …

This paper demonstrates a new class of AlN-based piezoelectric resonators for operation in
the microwave frequency range. These novel devices are identified as cross-sectional-Lamé …

Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical
resonators, provide an unprecedented platform for investigating a wide range of applications …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

Monolithic integration of Microelectromechanical Systems (MEMS) directly within CMOS
technology offers enhanced functionality for integrated circuits (IC) and the potential …

Mode interaction in M/NEMS arouses many interests in enhancing functionality in recent
years. In this paper, the dynamics of two mechanically coupled micro-resonators with …

This review provides a summary of the work completed to date on the nonlinear dynamics of
resonant micro-and nanoelectromechanical systems (MEMS/NEMS). This research area …

The further development of 5G and 6G communication systems introduced new frequency
allocations beyond 6 GHz, necessitating the development of compact bandpass filters that …