Artificial intelligence applications for MEMS-based sensors and manufacturing process optimization
Micro-electromechanical systems (MEMS) technology-based sensors have found diverse
fields of application due to the advancement in semiconductor manufacturing technology …
fields of application due to the advancement in semiconductor manufacturing technology …
A novel defect inspection system using convolutional neural network for MEMS pressure sensors
M Deng, Q Zhang, K Zhang, H Li, Y Zhang, W Cao - Journal of Imaging, 2022 - mdpi.com
Defect inspection using imaging-processing techniques, which detects and classifies
manufacturing defects, plays a significant role in the quality control of …
manufacturing defects, plays a significant role in the quality control of …
Parameter selection for health monitoring of electronic products
This paper presents an approach for selecting precursor parameters for health monitoring of
electronic products. The approach includes failure modes, mechanisms, and effects analysis …
electronic products. The approach includes failure modes, mechanisms, and effects analysis …
Adaptive process control and sensor fusion for process analytical technology
Increased globalisation and competition are drivers for process analytical technologies
(PAT) that enable seamless process control, greater flexibility and cost efficiency in the …
(PAT) that enable seamless process control, greater flexibility and cost efficiency in the …
Condition assessment and fault prognostics of microelectromechanical systems
Microelectromechanical systems (MEMS) are used in different applications such as
automotive, biomedical, aerospace and communication technologies. They create new …
automotive, biomedical, aerospace and communication technologies. They create new …
Machine learning algorithms for process analytical technology
Increased globalisation and competition are drivers for process analytical technologies
(PAT) that enable seamless process control, greater flexibility and cost efficiency in the …
(PAT) that enable seamless process control, greater flexibility and cost efficiency in the …
Characterisation of graphene electrodes for microsystems and microfluidic devices
Fabrication of microsystems is traditionally achieved with photolithography. However, this
fabrication technique can be expensive and non-ideal for integration with microfluidic …
fabrication technique can be expensive and non-ideal for integration with microfluidic …
Design of direct exponential observers for fault detection of nonlinear mems tunable capacitor
In this paper a novel method is proposed for construction of an exponential observer for
nonlinear system. The presented method is based on direct solution of dynamic error without …
nonlinear system. The presented method is based on direct solution of dynamic error without …
Application of Thau observer for fault detection of micro parallel plate capacitor subjected to nonlinear electrostatic force
This paper investigates the fault detection of a micro parallel plate capacitor subjected to
nonlinear electrostatic force. For this end Thau observer, which has good ability in fault …
nonlinear electrostatic force. For this end Thau observer, which has good ability in fault …
A Fault-Detection Method of MEMS Micromirrors with Hysteresis
Y Tan, X Li, C Ke, R Dong, Y Gu… - 2024 IEEE 18th …, 2024 - ieeexplore.ieee.org
Electromagnetic scanning micromirror (EMSM) is a micro-electro-mechanical system
(MEMS) chip used as an actuator in precision instruments. In this paper, the failure modes of …
(MEMS) chip used as an actuator in precision instruments. In this paper, the failure modes of …