Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …

Timed Petri nets (TPNs) are useful for performance evaluation of discrete event systems due
to their mathematical formalism. This paper focuses on their use to model the preemption of …

In semiconductor manufacturing, cluster tools tend to integrate a vacuum module (VM), a
loadlock module (LLM), and an equipment front-end module (EFEM). While scheduling …

This paper studies the challenging problem of scheduling single-arm multi-cluster tools with
wafer residency time constraints. They have a linear topology and their bottleneck tool is …

This paper proposes a methodology to categorize drivers' behaviors at a congested
signalized intersection. As a discrete event system model, timed Petri nets (TPNs) are used …

Complex multi-cluster tools have been extensively used in semiconductor manufacturing. It
is crucial to increase their productivity by their effective operation. With structural complexity …

This paper presents a scheduling method for semiconductor manufacturing systems through
utilizing a case-based reasoning approach that consists of modeling, casebase building …

Owing to large production capacity and high efficiency, multibridge machining systems
(MBMSs) have gained increasing attention in industry. Their multiple bridge machines work …

The trends of increasing wafer diameter and smaller lot sizes have led to more transient
periods in wafer fabrication. For some wafer fabrication processes, such as atomic layer …