Extreme ultraviolet lithography with table top lasers

MC Marconi, PW Wachulak - Progress in Quantum electronics, 2010 - Elsevier
Compact extreme ultraviolet (EUV) lasers with “table top” footprints which can be easily
installed in a small laboratory environment, had enabled in the last years applications that …

Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm

K Bergmann, SV Danylyuk, L Juschkin - Journal of Applied Physics, 2009 - pubs.aip.org
In this work, we report about the optimization of the spectral emission characteristic of a gas
discharge plasma source for high-resolution extreme ultraviolet (EUV) interference …

Holographic imaging with a nanometer resolution using compact table-top EUV laser

P Wachulak, M Marconi, R Bartels, C Menoni… - Opto-Electronics …, 2010 - degruyter.com
Holographic 2D/3D imaging with nanometer resolution using short wavelength extreme
ultraviolet (EUV) light is presented in this paper. Gabor's holograms were recorded with a …

Heating and cooling of the multiply charged ion nonequilibrium plasma in a high-current extended low-inductance discharge

VA Burtsev, NV Kalinin - Technical Physics, 2014 - Springer
Using a radiation magnetohydrodynamics two-temperature model (RMHD model) of a high-
current volumetric radiating Z-discharge, the heating and cooling of the nitrogen plasma in a …

[PDF][PDF] Micro-and Nano-Structure of Polymers and Molecular Materials

A Alswieleh - 2014 - etheses.whiterose.ac.uk
Polyelectrolyte brushes are commonly known to be responsive to changes in solvent,
temperature, pH and ionic strength. 276-277 One of the most studied groups of these …

Coherent lithography with tabletop soft x-ray lasers: latest achievements and prospects

MC Marconi, W Li, C Kyaw, W Rockward… - X-Ray Lasers 2016 …, 2018 - Springer
We present the latest results in the development of a Talbot lithography technique utilizing
tabletop SXR lasers. The main characteristics of the method are reviewed and a hybrid …

[PDF][PDF] 聚倍半硅氧烷类树脂在各波长光刻技术中的研究进展

毕研刚, 邹丽丽, 崔淑英, 徐晶, **晓珂, 傅天林… - 高分子通报, 2024 - gfztb.com
Polyhedral oligomeric silsesquioxane (POSS) is a class of organic-inorganic hybrid polymer
materials with a unique structure. They are widely applied in the field of photoresist due to …

[PDF][PDF] Нагрев и охлаждение неравновесной плазмы многозарядных ионов в сильноточном протяженном малоиндуктивном разряде

ВА Бурцев, НВ Калинин - Журнал технической физики, 2014 - journals.ioffe.ru
С помощью двухтемпературной МРГД-модели (радиационной магнитной
гидродинамики) сильноточного объемно излучающего Z-разряда проведено численное …

Measurement of the spatial degree of coherence in a Lloyd´ s Mirror interferometer

CL Ladera, G Donoso, E Stella - Latin-American Journal of …, 2017 - dialnet.unirioja.es
We present a low-cost experiment, suitable for undergraduate teaching laboratories, in
which the concept of degree of coherence is introduced. The spatial degree of coherence of …

[HTML][HTML] Parametric study of the interface behavior between two immiscible liquids flowing through a porous medium

AD Mariotti, E Brandaleze, GC Buscaglia - Papers in physics, 2009 - SciELO Argentina
Parametric study of the interface behavior between two immiscible liquids flowing through a
porous médium SciELO - Scientific Electronic Library Online vol.1 número2 Light effect in …