Si electrochemical liquid phase epitaxy: low-temperature growth of hyperdoped epitaxial Si films

N Downes, J DeMuth, J Waelder, QB Cheek… - Chemistry of …, 2022 - ACS Publications
Epitaxial films of Si have been prepared at room temperature by electrochemical liquid
phase epitaxy (ec-LPE). Crystalline Si films were grown on both Si (111) and Si (100) …

Micro-Raman investigation of p-type B doped Si (1 0 0) revisited

S Palleschi, D Mastrippolito, P Benassi… - Applied Surface …, 2021 - Elsevier
The do** concentration of B doped single-crystal Czochralski Si (1 0 0) wafers (6× 10 14-
5× 10 19 cm− 3) has been monitored via micro-Raman spectroscopy using visible (633 and …

[HTML][HTML] Boron activation in silicon thin films grown by PECVD under epitaxial and microcrystalline conditions

AJ Olivares, A Zamchiy, VS Nguyen… - Applied Surface Science …, 2023 - Elsevier
Boron do** level and boron activation in silicon thin films grown by PECVD under
epitaxial (p+ epi‑Si) and microcrystalline (p+ µc-Si) conditions have been investigated as …

Interfacial hydrogen incorporation in epitaxial silicon for layer transfer

J An, Z Zheng, R Gong, TBT Nguyen, H Jun… - Applied Surface …, 2020 - Elsevier
Recently, epitaxial Si layers have attracted strong attention, particularly in photovoltaics. This
successful application depends mainly on the easiness of their transfer to a foreign carrier …

Annealing of boron-doped hydrogenated crystalline silicon grown at low temperature by PECVD

M Chrostowski, J Alvarez, A Le Donne, S Binetti… - Materials, 2019 - mdpi.com
We investigate low-temperature (< 200° C) plasma-enhanced chemical vapor deposition
(PECVD) for the formation of p–n junctions. Compared to the standard diffusion or …

Transmission electron microscopy characterization of low temperature boron doped silicon epitaxial films

G Noircler, M Chrostowski, M Larranaga, E Drahi… - …, 2020 - pubs.rsc.org
Transmission electron microscopy (TEM) techniques can provide a complementary
understanding of the physico-chemical mechanisms of the growth and the annealing …

Investigating the Effect of Process Parameter on the Properties of Rf Sputtered pSi Thin Film by Taguchi and ANOVA Analysis

SM Uchayash, S Datta, A Touhami, AM Rahman… - Silicon, 2023 - Springer
Boron doped pSi was deposited on Si substrate in the RF magnetron sputtering system by
varying three process parameters, namely-sputtering power, working pressure, and Ar gas …

Self-formation of SiGe oxide, Ge, and void multilayers via thermal oxidation of hydrogenated epitaxial SiGe films

J An, R Gong, X Li, I Florea, L Watrin, PR i Cabarrocas… - Vacuum, 2023 - Elsevier
In this work, hydrogenated SiGe thin films epitaxially grown on crystalline Si (c-Si) at 175° C
are annealed at 800° C in a low vacuum system. The influence of H from the thin film and …

Investigation of the Effect of Process Parameters by Taguchi Method on Structural and Electrical Properties of RF Magnetron Sputtered SiO2 & pSi on Si Substrate

SM Uchayash - 2021 - search.proquest.com
Abstract In this work, Taguchi Signal-to-noise (S/N) analysis was applied to investigate the
effect of varying three process parameters, namely-sputtering power, working pressure and …

[ZITATION][C] Development of tunnel junctions for c-Si/perovskite tandem solar cells: A way forward