In recent years, several new applications of SiC (both 4H and 3C polytypes) have been
proposed in different papers. In this review, several of these emerging applications have …

A search of the recent literature reveals that there is a continuous growth of scientific
publications on the development of chemical vapor deposition (CVD) processes for silicon …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

Bending monitoring is critical in engineering applications, as it helps determine any
structural deformation caused by load action or fatigue effect. While strain gauges and …

Microwave split-ring resonators are utilized as sensors in a wide variety of applications due
to their remarkable features, such as extremely low cost, high sensitivity, and relatively high …

This work presents nonparametric identification of a Micro-Electro-Mechanical Systems
(MEMS) beam subjected to a non-classical nonlinear electrostatic (levitation) force. The …

3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical
properties (high Young's modulus and low density) that allow the device to be operated for a …

Silicon carbide (SiC) is recognized as an excellent material for microelectromechanical
systems (MEMS), especially those operating in challenging environments, such as high …

In this paper, we used micro-Raman spectroscopy in cross-section to investigate the effect of
different do** on the distribution of stress in the silicon substrate and the grown 3C-SiC …

This work reports on a resonantly operated piezoelectric MEMS strain sensor based on a
microbridge structure. The resonator is excited with a sputtered aluminum nitride layer and …