[HTML][HTML] Development and applications of aluminum nitride thin film technology
CLA Cunha, TC Pimenta, MA Fraga - Thin Films-Deposition …, 2022 - intechopen.com
Aluminum nitride (AlN) thin films have aroused the interest of researchers due to their
unique physicochemical properties. However, further studies on these semiconductor …
unique physicochemical properties. However, further studies on these semiconductor …
Growth and properties of sputtered highly (100)-oriented oxygenated AlN thin films for SAW sensing applications
CLA Cunha, TC Pimenta, MA Fraga - Microsystem Technologies, 2021 - Springer
A method for growth of highly (100)-oriented aluminum nitride (AlN) thin films on (100) Si
substrate, in poor vacuum systems, by radio frequency magnetron sputtering was …
substrate, in poor vacuum systems, by radio frequency magnetron sputtering was …
Structural properties and surface roughness of heterostructure GaN/AlN on Si (100) substrate
The GaN is considered by many as it has demonstrated the capability to be the
displacement technology for silicon semiconductor in power electronic devices and light …
displacement technology for silicon semiconductor in power electronic devices and light …
[CITATION][C] Producción y caracterización de películas delgadas de zinc/óxido de zinc obtenidas por evaporación catódica reactiva sobre polímeros fabricados por …
JJ Rocha Cuervo - Instituto Tecnológico y de Estudios …
[CITATION][C] Development and Applications of Aluminum Nitride Thin Film Technology
CLA Cunha, TC Pimenta, MA Fraga