Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Fluid manipulations at the microscale and beyond are powerfully enabled through the use of
10–1,000-MHz acoustic waves. A superior alternative in many cases to other microfluidic …

Acoustofluidics offers contact-free manipulation of particles and fluids, enabling their uses in
various life sciences, such as for biological and medical applications. Recently, there have …

Flexible electronics are a very promising technology for various applications. Several types
of flexible devices have been developed, but there has been limited research on flexible …

Surface acoustic waves sensors are based on piezoelectric materials. These sensors are
the best choice for sensing purposes due to their unprecedented accuracy. SAW sensors …

AlN and AlScN thin films with 27% scandium (Sc) were synthesized by DC magnetron
sputtering deposition and used to fabricate surface acoustic wave (SAW) devices …

ZnO thin films with wurtzite structure have been grown on Si (100) and glass substrates
using radio frequency (rf) magnetron sputtering at room temperature. The ZnO thin films …

Optical characterizations of preferred orientation (002) ZnO thin films, prepared by RF
magnetron sputtering under pure argon plasma, with different thicknesses have been …

Flexible ZnO/polyimide surface acoustic wave (SAW) based humidity sensors were
fabricated and their performances were investigated. ZnO films deposited on polyimide …

This review focuses on the development of surface acoustic wave-enabled acoustic drop
ejection (SAW-ADE) technology, which utilizes surface acoustic waves to eject droplets from …