Tri-axial linear accelerometers are key components in a great variety of applications and, in
particular, in navigation systems. Nonidealities such as scale factors, cross coupling, bias …

This paper presents a scale factor calibration method based on virtual accelerations
generated by electrostatic force. This method uses a series of voltage signals to simulate the …

The grid is considered as a crucial technology for the future knowledge-based economy and
science. The Wisdom Grid project (a joint research effort of the University of Vienna and the …

The uniqueness of microelectromechanical system (MEMS) devices, with their multiphysics
characteristics, presents some limitations to the borrowed test methods from traditional …

In an electrostatic force feedback accelerometer (EFFA1) system, nonlinearities in the
transfer function between the input acceleration and the output voltage signal are mainly …

This paper presents a behavioral model that can be used to improve the manufacturability of
systems based on MEMS convective sensors. This model permits to handle faults related to …

This paper presents an evaluation of a fully electrical test and calibration method for MEMS
capacitive accelerometers. The method is based on analytical expressions of the sensitivity …

The fast growth of MEMS technologies for the production of inertial sensors in the last
decade makes the characterization at wafer-level very important. In this paper is presented a …

This paper presents the designs for a new configuration of an electro-thermally actuated SU-
8 polymeric micro-manipulator. The electro-thermally driven micromanipulators were studied …

In this paper, an alternative test method for MEMS convective accelerometers is presented. It
is first demonstrated that device sensitivity can be determined without the use of physical test …